Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

Integrated Controller

EQY16DH Grease supply port (For 200 mm stroke or more) Vent hole (20) 88 Required space: J5 Opposite end [Origin end]2 Rod operating range1 Origin end2 (35.6) [Opposite end] Setup communication connector (M12) Width across fats 144 Stroke 2 2 4 x M4 x 0.7 thread depth 7 M5 x 0.8 27 23 32 thread depth 10 Parallel I/O connector (M12) (96) 0.2 35.5 33.75 18 0.2 16 25.5 Power supply connector

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

LB H F A 18.3 15 C 20 17 5 4 8 8 11 11 28 28 23 21.5 5.5 5.5 2.3 2.3 GA LC D GC LH M10 x 1.0 LY NA NN Y X Z S 33 33 5 5 9 9 6 6 MM LZ 14 14 LX M4 x 0.7 25 25 42 42 66 65 122 121 20.5 20.5 M12 x 1.0 M5 x 0.8 696 Air Cylinder CJ2W-Z 10-/1121-/22Flange (F): CJ2WF, CJ2WF 10112122View E NDh8 GA GC NN MM NN GC GA Mounting nut Relief port 2 x M5 x 0.8 Rod end nut Cover surface Piping port 2 x M5

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WB WA View E GC GA Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface GB Piping port M5 x 0.8 D LY LB LH LZ LX Head cover port location Axial direction (R) NB LT H NA A 2 x LC Mounting hole Y X The overall cylinder length does not change.

MGG

depth 30 410 66 128 143 262 Rc 1/2 40 110 19 (23) 23 40 180 (194) 85 188 64.5 79 For long strokes Bracket mounting strokes Note) Dimensions inside ( ) are for long strokes.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

A 23 23 E P B A X Insulation Red (+) 46 EB EA P 21 69 21.5 M5 x 0.8 (Pilot EXH. port) 92.6 44.1 67.2 180.8 L 71.2 (For E type) (Lead wire length) 1.55 0.3 mm2 26.5 13.5 11.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33 96.9 L plug connector with cover (LL) 3 02 03 52-SY7440 (R) -LL5 L 170.6 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 41.7

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5 43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in parentheses are the normally open type. 22 23 Series VX21/22/23 For Water, Oil, Steam/Manifold Dimensions: Manifold/Base Material: Brass, Stainless Steel Normally closed (N.C.): VVX21/VVX22/VVX23 Normally open (N.O

MY1

GA (Hexagon socket head plug) TT UU (Hexagon socket head plug) G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 1.1 (WW) QQ (Hexagon socket head plug) (WW) M5 x 0.8 M5 x 0.8 GA PP (Hexagon socket head plug) (Port) XX XX G Centralized piping type Centralized piping type 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) VV VV (Hexagon socket head plug) S WX 8.4 Bottom ported (Applicable

MXF

-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 4H9 depth 4 +0.030 0 4H9 depth 4 +0.030 0 80 NN-4.2 23 12.5 NN-8 6.7 H 2-M4 x 0.7 thread depth 10 5.5 NN 2 NN-M5 x 0.8 ( 1) x H G 11.5 Section AA A Operating port 2-M5 x 0.8 M 10 0.3 19.5 (Table length) N 2 ( 1): The number of pitches 21 7 J I 3 Z Max. 9 ZZ H G 27.5 5 4H9 +0.030 0 depth 4 (mm) M J I NN H G N Z ZZ Model MXF16

MQQ

x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13

XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

1

x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread

Shock Absorbers and Rate Controls

(lR)otill.l5xl (M(Sl 1.0 6.44 .25',| +.005/-.000 .251 +.005/-.000 o t l +.005/-.000 .l +.001 0 .010 |1/A 1.50il/A .88 .33 .23 .44 1.6 lbs. (LRl0lilll.l5x2(t(S) 2.0 9.07 -1.01 -ri 'bo +tr 0 .010 .500 + m0/'.010 r'r/A 1.50r'r/A .88 .23 .33 .23 .44 1.6 lbs. (tRlorilt.25xt ot(s) 1.0 6.44 +.005/. .7s +M5/.

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H0.1 0.4 D 50 40 185 145 57 79 M48 x 1.5 76 M8 x 1.25 40 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 C 31.5 20 90 70 30 40 M20 x 1.5 31 M5 x 0.8 20 K B 40 31.5 145 115 45 60 M24

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

Vacuum Pad

A B D Weight [g] ZP3P-T20PTSFK10-B5 32.5 68.5 23 28.5 ZP3P-T20PTSFK20-B5 42.5 106.5 51 41.8 6 ZP3P Series Dimensions: With Buffer ZP3P-T25PTSFJM-B5 ZP3P-T25PTSFKM-B5 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 17.5 21.5 A D B 17.5 21.5 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6