Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Fluoropolymer Piping Equipment

x 8 8 x 6 10 x 8 10 x 8 10 x 8 8 x 6 10 x 8 8 x 6 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 6 x 4 3 x 2 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 10 x 8 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 19 x 16 19

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

CC

E101. 10-17-16

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

Series MXP Precision Air Slide Table

10 J 6 Mounting base side B D 10 9.5 Across AA MXP10-20 Without magnet and switch rail 2-M30.5, 3.5 deep 2-M20.4, 3 deep For magnet mounting For rail mounting 8 2.5 4.7 6-M30.5 15 15 4 deep L (mm) Model G H J K L M N S V W Z MXP10-10 8 32 52.4 20 20 21 6.5 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 20 74 65 90 168 168 Precision Air Slide Table Series MXP Dimensions 12 MXP12 Scale:55%

Mechanical Valves Series NVM, NVFM, NVZNI

f30.51 o.24 (6) Millimeters in Parentheses A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06

IIIIIII

f30.51 o.24 (6) Millimeters in Parentheses A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14