CG5-S

40 44 to 800 M14 x 1.5 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!

o

1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!

o

1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!

HRX-OM-R016

The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

MQQ

Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10

MQQ

G5-S CV MVGQ CC RB J D-X 20Data 10-5-19 19 Series MQM Dimensions Basic style: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7

Fluoropolymer Piping Equipment

E E H J K L1 L1 L2 L2 M Min. port size t W1 W2 LQ3P1A 1/8" 10 9 11 6 14.5 23.5 22.5 58 56 14 2 8 16 17 LQ3P2A 1/4" 17 16 16 7 20.5 28 27 69 67 20 4 8 21 24 LQ3P3A 3/8" 22.5 19.5 21 7 24.5 39 36 89 83 25 6.4 8 26 28 LQ3P4A 1/2" 24.5 22.5 24 9 30.5 44.5 42.5 100 96 29 9.5 8 32 36 LQ3P5A 3/4" 26.5 24 32 9 36.5 50.5 48 117 112 37 16 13 41 43 LQ3P6A 1" 30 26 41 10 48.5 60 56 136 127.5 49 22 13

Environment

(MB) MA MC MD Section XX 11LEJS XB XA H9 XA 25ALEC [mm] Size Stroke range [mm] A B C D EH EV FH FV GH GV H J K L M O1 LEC S 25 15 to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 69.6 78.6 76.2 173.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 101 to 500 178.5 160 LEC Y Size Stroke range [mm] R OA

Integrated Controller

13 14 Cable/Right angled connector mounting view5 ML + Stroke 24.5 Required Space5 [mm] 4 Cable connector type J Straight 115 3 H9 (+0.025 0 ) 3 XX (2:1) 1 The range of movement of the rod according to the movement instructions.

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

C76

0.65 J Auto Switch Mounting, Minimum Possible Cylinder Stroke Band Mounting Type (mm) No. of auto switches Auto switch model 2 pcs. n pcs. 1 pc.

C76

1.2 J Auto Switch Mounting, Minimum Possible Cylinder Stroke Band Mounting Type (mm) No. of auto switches Auto switch model 2 pcs. n pcs. 1 pc.

ZPT/ZPX

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to

IDU/IDF

63 L 20 Drain tube K H 4-13 [200 to 240VAC specification] Power cord outlet Model Port size A J B C D E F G H K L IDU3D IDU4D 246 496 509 87 125 344 23 175 151 206 356 44 67 Rc 3/8 242 591 606 31 170 469 13 171 179 202 446 44 67 : Power source 200 to 240VAC 3 Refrigerated Air Dryer Series IDU Small IDU6D, 8D Compressed air inlet Compressed air outlet (315) 600 (60) 220 (141) (445) (85) Illuminated

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.