CLA

. . n~.a 12...

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

5 Port Solenoid Valve SY Series

-04 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Series M8 Connector Pressure center 12 V DIN terminal

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

VP4

VP7-8: Flow Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics Type of actuation Valve model Port size Single 12 12 12 12 13(6.8) 7.5 7.5 7.5 7.5 7.6(6.1) 0.30 0.30 0.30 0.30 0.32(0.35) 0.32 0.32 0.32 0.32 0.34(0.23) 3.1 3.1 3.1 3.1 3.3(1.8) 2.0 2.0 2.0 2.0 2.1(1.6) 13 13 13 14(13) 12 7.6 7.6 7.6 7.6(7.6) 7.6 0.30 0.30 0.30 0.30

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

4-channel Flow Monitor ( compatible)

System error (Er0, 4, 6, 8, 40) is displayed. (2) Check if the power supply voltage 6 is in the range 12 to 24 VDC 10%. (2) Supply power in the range "HHH" is 12 to 24 VDC 10%. displayed. (1) Reset applied flow to a (1) Check if the flow exceeds the level within the set flow range.

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

DOC1003626

3.11.1 Function code: 04 Reading multiple registers .3-12 3.11.2 Function code: 06 Writing registers.3-13 3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18 HRS400-A-46 DOC1003626 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure

Series IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.

Soft Start-up Valve AV2000/3000/4000/5000 1

-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

One-touch Fittings

10.4 4.5 1.7 10 KQ2R06-10A1 10.4 9.7 12 33.9 18.3 13.3 13.1 10.4 4.5 2.1 12 KQ2R06-12A1 12 9.7 12 35.7 18.7 13.3 13.1 10.4 4.5 3.2 Applicable fitting size d 6 8 10 KQ2R08-10A 13.2 13 35.1 19.5 14.2 26.1 18 6 2.9 12 KQ2R08-12A 13.2 13 36.5 19.5 14.2 26.1 18 6 3.4 d 10 12 KQ2R10-12A 15.9 15.6 39.2 22.2 15.6 41.5 32.8 7.5 4.5 16 KQ2R10-16A 15.9 15.6 44.7 24.1 15.6 41.5 32.8 7.5 6 12 16

SV

02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)