Series 10-, 21- AF-A Air Filter

Air Filter Series 1021AF-A How to Order * "J" must always be selected. Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

AS2001F-04-3-X12 Ex.) AS2001F-04-3-X21 Note) Not particle-free Throttle Valve (Without Check Valve) X214 Ex.)

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

High Power Cylinder:

5 20: M5 X 0.8 X 6 25, 32: M6 X 1 X 6 40: M8 X 1.25 X 8 Chrome-molybdenum steel Nickel plated Hexagon socket head screw 20, 25: M5 X 0.8 X 6 32, 40: M6 X 1 X 8 Hexagon socket head set screw Nickel plated Chrome-molybdenum steel !6 Name plate !7 Special resin Cushion seal !8 Replacement Parts Bore size (mm)/Part No. Description No.

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

IDX-OM-W011

46 kW 0.75 1.5 2.2 3.7 5.5 7.5 11 15 1ANR 2065% 2 3 30mA 4() IDF Series 6-1 6 1 IDX-OM-W011 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-2 GWP 6 2 IDX-OM-W011 6 6-3 IDF1E / IDF2E /IDF3E ( 10 IDF3E-20 [AC100V] :0.8m) (:1.9m) [ AC200V ] [ AC200V ] (17) mm A B C D E F G H J

IDX-OM-W014

M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014 6 6-4 IDU3E4E AC100/100,110 (50/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V (50Hz) PRS AC200/200,220 (50/

IDX-OM-W023

2) IDU Series 7-1 71 IDX-OM-W023 8 K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU8E/11E/15E1-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04

tTV2000/3000

. : j 1w301 Minimum supply pressure Set pressure + 0.1MPa Maximum supply pressure 0.2MPa 1.0MPa Regulating pressure rang 0 005 to 0.1 MPa 0.005 to 0.5MPa | 0.005 to 0.9MPa Voltage 24YDC !

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 04 (ø4), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 2 (M5 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: M5X0.8, Applicable Tube OD: 04 (Ø4 mm), Sealant: None, Lock Nut: J (Round)

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 8J (8 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 04 (1/2), Option: B (Bracket), Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: JR (J + R), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 04 (1/2), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: Standard, Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard