1.63

speed of 200 mm/s.

Basic Type/Direct Mount Type

B Counter bore depth C T T Y HT HP P (Piping port) (Operating direction: A) L 0 -0.1 22 8 Note 1) TC X F 14 WP 19.5 12.5 D 30 13 WS GP GW 4 x LD PW QW Plug 12.5 P (Piping port) (Operating direction: B) 2 x 4 x MM Thread depth M Switch rail HR HS CR W K Plug G G Z + Stroke Q + Stroke CY3RG15 P (Piping port) (Operating direction: B) CY3RG25, 32, 40, 50, 63 Note 1) 50, 63: L 0 0.2 CY3RG10 B

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

B dimension is 24.5 mm.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

REC

Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0

JA/JAH/JB/JS

(mm) Operating pressure Air pressure compact cylinder 1 MPa or less Model Applicable bore size (mm) Applicable cylinder nominal thread size Rotating angle Compression side Tension side JB12-3-050 JB16-4-070 JB20-5-080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 12 M3 x 0.5 112 112 0.5 Operating range Center of sphere 16 M4 x 0.7 200 200 0.5 Axial center Operating range 20 M5 x 0.8 1100

JA/JAH/JB/JS

x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

MNB

B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

MXW Series Long Stroke Slide Table

: D-F9B (V), D-F9N (V), D-F9P (V) Switch operation range Stroke (mm) Model 300 275 250 225 200 175 150 125 100 75 50 25 A 23.5 23.5 23.5 23.5 27.5 48.5 B 204.5 179.5 154.5 129.5 104.5 83.5 3 (3.5) MXW 8 W 11.5 11.5 11.5 11.5 15.5 36.5 V 216.5 191.5 166.5 141.5 116.5 95.5 A 27 27 27 27 47 B 203 178 153 128 108 3 (3.5) MXW12 W 15 15 15 15 35 V 215 19 16 140 120 A 30.5 30.5 30.5 30.5 30.5

MXQ

B side traveling parallelism to A side Refer to Graph (1).

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

Applicable Auto Switch Model

Cylinder series Bore size (mm) Technical Data 20 25 32 40 CDM2, CDBM2 CDLM2 BM3 020 BM3 025 BM3 032 BM3 040 Part No. of auto switch mounting band Cylinder series Bore size (mm) 20 25 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M CDVS, CDLA, CE2, CNA CDL1 BS1 -125 BS1 -140 BS1 -160 CDS1 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1

Electric Actuators

282 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase 240 to 200 2 phase 224 284 to 200 5 phase 238 to 100 2 phase to 30 218 5 phase 234 to 30 294 2 phase 220 to 80 5 phase 236 to 80 2 phase 222 to 100 304 5 phase 248 to 200 284 2 phase to 200 232 5 phase 246 to 100 2 phase 226