4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

Table of Contents

External slider tube Spacer Space ring Slide table Side plate A Side plate B y u i o !

VQ5000

D U D U D 179 106 46.8 59.2 83.5 U side Station number 55.5 M5 ground screw 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P = 41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical

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Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

A

R E R E G U L AT O R ACCESSORIES P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R Mounting Bracket B24 NAR425 B25 NAR625 S Y M B O L S Bracket Dimensions Bracket No.

Smooth Cylinder/Low Speed Cylinder

A U 32 to 100 D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV 32 to 100 D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V U B A 32 to 100 D-P3DW U B A 40 to 100 D-P4DW B A U Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A72/A7H/A80H D-A73C/A80C/F7 D-F79F/J79/F7V D-J79C/F7W D-J79W/F7WV Auto switch model

Fieldbus System

A 14 A B A 14 A B A B A 14 A B A 14 A B 2 3 A 14 U side D side PWR OUT 0 1 4 5 Mounting 2 3 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT Nil D D0 D3 Direct mounting DIN rail mounting (With DIN rail) DIN rail mounting (Without DIN rail) 8 7 1 2 3 4 5 Valve stations I/O Unit stations 1 2 For 3 stations Specify a longer rail than the standard length.

REA/REB

plated Chromium molybdenum steel Adjusting bolt B Magnet B u @4 Urethane rubber Carbon steel Nickel plated Hexagon nut Bumper i @5 Aluminum alloy Chromated Aluminum alloy Switch mounting rail Cushion seal holder o @6 Aluminum alloy Chromated With auto switch Auto switch Piston !

REA/REB

plated Chromium molybdenum steel Adjusting bolt B Magnet B u @4 Urethane rubber Carbon steel Nickel plated Hexagon nut Bumper i @5 Aluminum alloy Chromated Aluminum alloy Switch mounting rail Cushion seal holder o @6 Aluminum alloy Chromated With auto switch Auto switch Piston !

0.4

A B A B A B A B A B A 2 93.5 SZ 75 66 (40) 37.5 VF 4 x M4 mounting hole Manual release for switching connector direction Applicable connector: D-sub connector (26P) (Complies with MIL-C-83503) VP4 Stations n 1 2 3 4 5 6 7 8 U side D side C8: 8 One-touch fitting C8 [3(R) EXH port] VQ 1/2 DIN rail clamp screw R R 62.5 12 X 3 12 X 3 60 VQ 4/5 40.5 B B B B B B B B 25 P P 1 1 A A A A A A A A

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Aluminum High Vacuum Angle Valve

U type: DC only.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

ISO Cylinder

M A B C D E F G H Max. screw-in depth P Allowable eccentricity U Max. operating tension and compression power [kN] Nominal thread dia.

Air Cylinder

8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Battery-less

2 A A @2 @0 @3 u !9 e o !1 !4 !5 !3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

5

U 32 to 100 D-A7l D-A80 D-A7lH D-A80H D-F7l D-J79 D-F7lW D-J79W D-F79F D-F7NT D-A73C D-A80C D-J79C D-A79W D-F7lWV D-F7lV U B A 32 to 100 D-P3DWA A B U Auto Switch Proper Mounting Position (mm) D-M9l/D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A72/A7lH/A80H D-A73C/A80C/F7l D-F79F/J79/F7lV D-J79C/F7lW D-J79W/F7lWV Auto switch model D-A9l D-A9lV D-A73 D-A80 D-F7NT D-A79W D-P3DWA Bore size A B A