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B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa Load

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, CLS1 ONE WAY LOCK-UP CYLINDER, TE, 125MM CLS1 DBL-ACT AUTO-SW, 88.1849 lb

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

United States Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) GERMANY SMC Pneumatik GmbH Canadian Branch Offices SMC Corporation of America (Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 TEL: (770) 624-1940 FAX: (770) 624-1943 SMC Corporation of America (Milwaukee) 16850 W.

70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5 51 8 218.5 1/4 161.5 288.5 27 M14 x 1.5 66 11.2 52 304.5 58 0 235.5 3/8 175.5

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Actuator Controller q q w 549 Fieldbus Network CC-Link Direct Input Type Step Motor Controller LECPMJ Series Page 600 CC-Link Ver. 1.10 compliant External data import function The step data can be rewrite temporarily by feeding back external information to the PLC. 64 or more data points can be defined with the 3 types of data import modes.

Example) Obtain the air flow rate for P1 = 0.4 [MPa], P2 = 0.3 [MPa], T = 20 [C] when a solenoid valve is performed in C = 2 [dm3/(sbar)] and b = 0.3. 293 According to formula 1, the max. flow rate = 600 x 2 x (0.4 + 0.1) x = 600 [L/min (ANR)] 273 + 20 0.3 + 0.1 Pressure ratio = = 0.8 0.4 + 0.1 Based on Graph (1), it will be 0.7 if the pressure ratio is 0.8 and the flow rate ratio is b

IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E NPT3/8 10(17) 11(19) 12(20) ZFC NPT1/2 15(25) 16(27) 17(28) 25(43) 26(45) 28(47) SF 100F (37.8C) 100psi (0.7MPa) NPT3/4 41(70) 43(74) 45(77) 59(100) 62(106) 65(110) SFD 71(120) 80(136) 86(147) NPT1 107(182) 120(205) 130(221) LLB NPT1 1/2 161(273) 173(294) 181(308) 226(384) 258(438) 297(504) NPT2 AD 300(510) 353(600

Status (3): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is below 18C, which is the value set for AL11. Status (4): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is above 22C, which is the value set for AL10.

Status (3): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is below 18C, which is the value set for AL11. Status (4): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is above 22C, which is the value set for AL10.

Status (3): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is below 18C, which is the value set for AL11. Status (4): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is above 22C, which is the value set for AL10.

PA07 1 12 6 3 12 6 3 20 10 5 16 8 4 Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration

mm 600 mm 600 mm 600 mm 600 mm z z z 3.2.2 z z 7 7.3 z IDF-AB500 14 1 IDFA60/70/80/90 Series 3-2 IDX-OM-W094 3.2.3 z z z z z 60 z 65 65 z z z z z z z OUT IN (IN) (OUT) IN OUT IDFA60/70/80/90 Series 3-3 IDX-OM-W094 3.2.4 z 12mm 5m8mm z z z z SO O S IDFA60/70/80/90 Series 3-4 IDX-OM-W094 3.2.5 7.1 0.2m IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 16AWG (1.25mm

Allowable kinetic energy at piston impact 20 32 25 Bore size (mm) Theoretical Output 50 to 700 50 to 600 50 to 600 Piston speed (mm/s) 0.17 0.271 0.32 Allowable kinetic energy (J) (N) Model Operating direction Operating pressure (MPa) Rod size (mm) Piston area (mm) Cushion Needle Adjustment Caution 0.2 0.1 62.8 47.1 98.2 75.6 161 121 0.3 188 141 295 227 482 362 0.4 251 188 393 302 643 482

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint