Bearing Type: Slide bearing, Bore Size: 25mm, Port Type: NPT, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Slide bearing, Bore Size: 63mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Slide bearing, Bore Size: 40mm, Port Type: G, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Slide bearing, Bore Size: 32mm, Port Type: G, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Slide bearing, Bore Size: 63mm, Port Type: G, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: L (Ball bushing bearing), Bore Size: 63mm, Port Type: TN (NPT), Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: D (Built-in Magnet), Mounting: B (Basic), Type: N (Rubber Bumper), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: D (Built-in Magnet), Mounting: L (Axial Foot), Type: A (Air Cushion), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 20mm, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: D (Built-in Magnet), Mounting: B (Basic), Type: N (Rubber Bumper), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: D (Built-in Magnet), Mounting: B (Basic), Type: A (Air Cushion), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 25mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

Nil Both sides piping type n n pcs.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

ISO Cylinder

(n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15 + 50 D-H7C D-C73C D-C80C 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) D-H7C D-C73C D-C80C 10 15 65 50 + 27.5 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV

Table of Contents

98.1 N 147.1 N 245.2 N 392.3 N -X Place the center of gravity of the load and center of the slide unit close during operation.

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +