Table of Contents

4 @1 w @4 !0 y !3 !5 @3 !0 !

Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

NCQ8

M2 bolt circle M1 W I dia.

Air Cylinder

CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W 11 Lock spring Stainless steel 12 Bumper Urethane * Seal kit includes @6 and @7. Order the seal kit, based on each bore size. (Except #3.) * Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

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Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

2–4

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

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Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a