HRS100/150

Required installation space 800 mm or more Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 800 mm or more Piping 2000 mm or more Caution 1. Regarding the circulating fluid and facility water pipings, consider carefully the suitability for temperature, circulating fluid and facility water.

VCL

Grommet: G Conduit: C 300 V D D F Q F Q 280 300 VC Class H coil Broken line section C C G1/2 R R VDW VQ E E VX2 A H A H B B 2-P Port size 2-P Port size VX 2-M, thread depth N 2-M, thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K K VN

Compact Electric Actuator Series LG1

100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-F LG1H202300-F LG1H202400-F LG1H202500-F LG1H202600-F LG1H202700-F LG1H202800-F LG1H202900-F LG1H202-1000-F LG1H202-1200-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100

Soft Start-up Valve AV2000/3000/4000/5000 1

AV 00 1 G 20 02 F C AV AU Manual override AF Nil: Non-locking push type (Flush) B: Locking type (Tool required) C: Locking type (Lever) Soft start-up valve AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body size IR 20 30 40 50 1/4 3/8 1/2 3/4, 1 VEX AMR Light

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

Title not found

(800) 526-7661

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

KR

MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Applicable tubing O.D.

F

Outside Local Area: (800) 258-9200 !

Air Cylinder NCA1 Series

HOW TO O R D E R X T A1 NC A U T O S W I T C H C O N S T R U C T I O N T Y P E (PLEASE SEE PAGE 1 FOR CONSTRUCTION DETAILS) Standard D Auto Switch capable (Stainless and Steel Construction (1.5~14) All Stainless Steel (1.5~14) Steel w/ Composite Tube (1.5 14) Stainless Steel w/ Composite Tube (1.514) ST SS SCT SSCT ...

VXF

VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Solenoid Specifications VX3 Pilot exhaust noise (dB) Apparent power VA Temperature rise (C) (Rated voltage) Power consumptions W (Holding) Air operated type Voltage fluctuation (%) Frequency (Hz) Power source VXA

Electric Actuator Triple Axis P&P Unit

250 300 21.3 350 400 23.4 450 500 25.5 550 600 27.6 1500 46.5 Stroke(mm) X axis 700 29.7 750 800 31.8 850 900 33.9 950 1000 36.0 1100 38.1 1200 40.2 1300 42.3 1400 44.4 3 Triple Axis P&P Unit How to Order Single Axis LG 240Z 50 Y G J Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol H A C J Y axis motor

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

Series AK1000

22 Hastelloy C-22 Hastelloy C-22 PCTFE 80 0.55 316 SS PCTFE (Option: Vespel) 70 0.48 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 Dimensions inch (mm) 50 0.34 AK1400T 40 0.28 30 0.21 2.12 (53.8) 20 0.14 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or BP) 0 0.00 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) AK1400T 80 psig (0.55 MPa) Inlet pressure

MGQ

Order the seal kit, based on each bore size. 8-20-8 9 Compact Guide Cylinder Series MGQ Bore Size 12 to 25: MGQM, MGQL 4-YY depth YL MX MTS MY CY W + Stroke MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX View A D-X 4-NN through 4-MM depth ML 20Data C + Stroke

V100

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP S070 VQ VKF VQZ VZ VS VFN Coil temperature rises: 1C (With power saving circuit) Sonic conductance C: 0.037 (Standard)/C: 0.076 (Large flow capacity) Series Flow characteristics C[dm3/(s bar)] b Cv Standard Large flow capacity V14 V14A 0.037

VXR21/22/23

Then the pressure in the pressure action chamber B falls to open the main valve C. < Valve closed > When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

Modular F.R.L. Unit

C Float type auto drain (N.O.)

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)