Bore Size: 15mm, Stroke: 350mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Z73L--Reed, DC Volt., AC Volt, 2 Wire, LED, 3M, Number: -

Bore Size: -, Port Type: -, Stroke: -, Stroke Adjustment: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bearing Style: L (Ball Bush Bearing), Bore Size: 20mm, Thread: Rc, Stroke: 20mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: L (3m)

Bearing Style: Ball Bush Bearing, Bore Size: 20mm, Thread: Rc, Stroke: 20mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: 3m, Number: -

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Specification: 10 (Clean Series, Relief Type), Bearing Type: M (Slide Bearing), Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Specification: Clean Series, Relief Type, Bearing Type: Slide Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: 3m, Number: -

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

VFR

Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-20A SY5000 SY5000-39-1A SY7000 SY7000-39-1A SY3000 SY3000-38-20A SY5000 SY5000-38-1A SY7000 SY7000-38-1A Rc 1/4 SY9000 SY9000-39-1A Rc 1/4 SY9000 SY9000-38-1A Series Round head combination screw Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.