70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

Refrigerated Air Dryers

Valve closed Lifting position Valve open 45 or more 45 or more 45 IDF/IDU Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to the back cover for Safety Instructions.

energy saving effect

3000 m Circulating fluid Note 1), 2) Tap water, 15 to 40% Ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity Note 3), 9) kW 10.5 15.7 20.5 25 28 Heating capacity Note 4) kW 2.5 3 5.5 7.5 Temperature stability Note 5) C 0.1 Rated flow (Outlet) L/min 45 (0.43 MPa) 45 (0.45 MPa) 125 (0.5 MPa) Maximum flow rate L/min 120 130 180 Maximum

HRX-OM-Y098

9 0.5 to 45 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 Particle filter filtration accuracy (Accessory) m 5 5 5 5 5 5 CH1 : Rc1 (Symbol FG1,Symbol NNPT1) Circulating fluid outlet, Circulating fluid return port CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2) Tank drain port CH1 : Rc3/4 (Symbol FG3/4,Symbol NNPT3/4 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2 CH1 : Stainless steel, Copper (Brazing filler

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

VM

Straight plunger Roller plunger Cross roller plunger 1.5 0.7 0.7 0.3 0.4 0.7 30 45 30 Roller lever VZM500 VZM400 VFM300 VFM200 One way roller lever 45 30 Straight plunger Roller plunger Flat button Groove 0.5 0.2 0.2 0.1 0.2 30 45 30 Roller lever Protrusion VM800 Adjustable roller lever 45 Adjustable rod lever Recessed portion Fastening ring Avoid abrupt angles on limit switch actuator.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

LEC-OM07605CN

4.2 . 45 4.3 . 47 4.3.1 . 47 4.3.2 . 4-10 4.3.3 . 4-11 4.4 . 4-13 4.5 . 4-13 4.5.1 (MR Configurator2) . 4-14 4.5.2 . 4-17 5 515-45 5.1 . 52 5.1.1 ([Pr.

MXQ

Symmetric type is also the same. 8-5-44 45 Air Slide Table Series MXQ Construction !1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

XL

SMC specified parts should be used for service parts. 45 Series XL Specific Product Precautions 5 Be sure to read before handling.

CNA

105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8, 12, 16 D-P5DWL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 140 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 120 + 65 n = 4, 8, 12, 16 15 + 65 n = 2, 4, 6, 8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke

CNA

105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8, 12, 16 D-P5DWL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 140 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 120 + 65 n = 4, 8, 12, 16 15 + 65 n = 2, 4, 6, 8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke

HRX-OM-S004

5.19.1 Alarm buzzer sound setting . 5-45 5.19.2 Setting/checking of alarm buzzer sound . 5-45 5.20 Alarm customizing function . 5-46 5.20.1 Alarm customizing function . 5-46 5.20.2 Setting and checking of the alarm customizing function . 5-50 5.20.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-63 HRS Series HRX-OM-S004 Contents 5.21 Communication function

rep-modular-e

Rotate the assembly 45 degree (right or left) until the lock button is tossed up to mount the bowl assembly. Ensure the lock button is up. Lock button is up.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

High Vacuum Angle Valve, XL Series

80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Rotate the assembly 45 degree (right or left) until the lock button is tossed up to mount the bowl assembly. Ensure the lock button is up. Lock button is up.

Vacuum System Peripherals:

5 45 45 45 M5 x 0.8 ZX 1 8 1 4 , , , , 1 4 3 8 1 4 3 8 1 2 ZR 3 4 3 4 , 1 1 ZM Inlet pressure 0.7 MPa, Pressure drop 0.05 MPa ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure