ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

Process Pump

First, mark the intersection point for a discharge rate of 600 mL/min and a discharge pressure of 0.15 MPa. 2. Find the pilot air pressure for the marked point.

25

Since 45% of the clear water discharge is equivalent to 270 mL/min in the required specifications, 270 mL/min 0.45 = approximately 600 mL/min, indicating that a discharge rate of 600 mL/min is required for clear water. 3. Finally, find the pilot air pressure and pilot air consumption based on the flow rate characteristic graphs.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. load current: 80 mA, Internal voltage drop: 1.5 V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

7

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 VXH VXF VX3 VXA 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T 157 VXD Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI = L (liter). b : Critical pressure ratio [] P1 : Upstream pressure [MPa

1

for 16, 20) Data MY2H/HT 16, 25, 40 50 to 600 601 to 1500 (Up to 1000 for 16) 10 10 to 75 80, 90, 100, 110, 120, 125, 150 CXSM CXSL 10 to 100 15 110, 120, 125, 150 110, 120, 125, 150, 175, 200 20, 25, 32 10 to 100 225, 250, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) CXWM 16, 20, 25, 32 25 to 200 CXWL 16, 20, 25, 32 225, 250, 275 25 to 200 ML1 25,

MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 stroke.

5

1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 Unit: MPa Bore size (mm) 32 40 50 63 80 100 Min. operating pressure 0.02 0.01 Note 1) Intermediate strokes not listed above are

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

Description Material Note ALF400, 400-06 ALF500, 600 ALF800, 900 Platinum silver painted Body Housing Aluminum die-casted Aluminum casted Aluminum die-casted 1 2 Platinum silver painted Replacement Parts No. Description Material Part no. Qty.

HRX-OM-W060

Status (3): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is below 18C, which is the value set for AL11. Status (4): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is above 22C, which is the value set for AL10.

HRX-OM-Y098

Status (3): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is below 18C, which is the value set for AL11. Status (4): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is above 22C, which is the value set for AL10.

HRX-OM-X037

Status (3): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is below 18C, which is the value set for AL11. Status (4): No alarm is activated since the temperature returns to the range within Out Time 600 seconds even though it is above 22C, which is the value set for AL10.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 12 6 3 12 6 3 20 10 5 16 8 4 Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration

IDX-OM-W094

mm 600 mm 600 mm 600 mm 600 mm z z z 3.2.2 z z 7 7.3 z IDF-AB500 14 1 IDFA60/70/80/90 Series 3-2 IDX-OM-W094 3.2.3 z z z z z 60 z 65 65 z z z z z z z OUT IN (IN) (OUT) IN OUT IDFA60/70/80/90 Series 3-3 IDX-OM-W094 3.2.4 z 12mm 5m8mm z z z z SO O S IDFA60/70/80/90 Series 3-4 IDX-OM-W094 3.2.5 7.1 0.2m IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 16AWG (1.25mm

CXS

Allowable kinetic energy at piston impact 20 32 25 Bore size (mm) Theoretical Output 50 to 700 50 to 600 50 to 600 Piston speed (mm/s) 0.17 0.271 0.32 Allowable kinetic energy (J) (N) Model Operating direction Operating pressure (MPa) Rod size (mm) Piston area (mm) Cushion Needle Adjustment Caution 0.2 0.1 62.8 47.1 98.2 75.6 161 121 0.3 188 141 295 227 482 362 0.4 251 188 393 302 643 482

Low torque Metal seal type Rotary joint

Fixed (Body) 0.003 to 0.20 N.m or less 0.003 to 0.20 Low rotational torque 0.003 to 0.20 N.m or less Low rotational torque Rotary Joint Turntable Allowable RPM 600 to 3000 min-1(r.p.m) Allowable RPM 600 to 3000 min-1(r.p.m) 600 to 3000 Drive (Adapter plate) Drive motor Application of adapter plate drive Not suitable for transmission of drive Series MQR Low torque Metal seal type Rotary joint

MGC

75, 100, 125, 150, 350, 400, 450, 500, 600, 700, 800 200, 250, 300 MGCL Ball bushing baering 350, 400, 450, 500, 600, 700, 800, 900, 1000 *Short stroke or intermediate stroke(except above stroke): Manufactured upon receipt of order 3.20-2 Compact Guide Cylinder Series MGC Specifications MGCll20 MGCll25 MGCll32 MGCll40 MGCll50 Model CDGIBA20 CDGIBA25 CDGIBA32 CDGIBA40 CDGIBA50 Base cylinder

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire