VXP21/22/23

550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 3300 1 4 1 2 1.0 1.0 1.0 1.0 1.0 1.0 Water Air Oil 1.5 4200 5400 Steam 1.0 5900 32A 7300 40A 9200 50A Note) Weight of grommet type.

Interface Regulator for VQ4000 5 Port Solenoid Valve

1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure

Series SV

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

XL

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

Magnet: D (Built-in), Mounting: B (Basic), Cushion: A (Air Cushion), Bore Size: 25 (1"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic), Cushion: A (Air Cushion), Bore Size: 32 (1 1/4"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic), Cushion: A (Air Cushion), Bore Size: 40 (1 1/2"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: C (Single Clevis), Cushion: N (Rubber Bumper), Bore Size: 40 (1 1/2"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: G (Rear Flange), Cushion: A (Air Cushion), Bore Size: 25 (1"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: L (Foot), Cushion: N (Rubber Bumper), Bore Size: 32 (1 1/4"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: U (Front Trunnion), Cushion: N (Rubber Bumper), Bore Size: 40 (1 1/2"), Stroke: 1200 (12"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 150 (1 1/2"), Stroke: 1200 (12"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 075 (3/4in), Stroke: 1200 (12"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 106 (1 1/16"), Stroke: 1200 (12"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 150 (1 1/2"), Stroke: 1200 (12"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: Built-in, Mounting: Rod Side Rectangular Flange, Bore Size: 5", Stroke: 12", Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Option: -, Cushion: -

Magnet: Built-in, Mounting: Rod Side Rectangular Flange, Bore Size: 6", Stroke: 12", Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Option: -, Cushion: -

Magnet: Built-in, Mounting: Tie Rod Extended, Rod Cover End, Bore Size: 8", Stroke: 12", Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Option: -, Cushion: Both Ends

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: G (Centralized Piping), Stroke: 1200mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)