Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

X Z Y m3 x g x X x m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

PF2A/PF2W

(Add 20 g for the types of analog output whether voltage or current output selected.)

High Vacuum Angle Valve

D-G

SMC

Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA

CRQ2

Form (mm) G H UX UZ M N D (g6) Size 20 30 40 8 21 50 65 15 10 11 75 18 12 10 24 57 13 84 20 15 11 27 64 15 2.

Series VQ Base Mounted Metal Seal/Rubber Seal

Flat cable connector assembly (Option) Note Ass'y No Cable length (L) 1.5m 3m 5m AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 Cable 20 core X 28AWG For other commercial connectors, use 20 pin type with strain relief made in conformity with MIL-C-83503. How to Order Manifold VV5Q 1 08 C6 1 N G Option Symbol Option Remains VQ1000 VQ2000 None Check valve for prevention of back press.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

•

M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

VM

Twist selector (3 position) VM133-M5-35R/B/G/Y VM153-M5-35R/B/G/Y Panel mounting hole JIS Symbol 3 port 5 port 3-M5 x 0.8 Depth 4 R port (5 port only) 0.5 MPa supply 20 N F.O.F. 45 T.T. 5-6-19 18 2/3 Port Mechanical Valve Series VM200 Large flow capacity. A variety of actuator types.

T

Burst Pressure Characteristics Curve and Operating Pressure How to Order 5 TPS0604 B 20 4 Burst pressure (MPa) Tubing model Burst pressure 3 Color Length per roll Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20 m roll 100 m reel Symbol 20 100 Max. operating pressure 2 1 20 0 0 20 40 60 80 Operating temperature (C) 15-6-23 1 Miniature Tubing and Miniature Fittings Series

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N

CJ2X/CUX/CQSX/CQ2X/CM2X

0.05 0.05 MK(2) Standard Stroke RS Q G Bore size (mm) Standard stroke (mm) RS H A 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 RZQ Precautions MI W S CEP1 Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

15

Mounting orientation and static moment Mounting orientation Static load Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Bore size (mm) A [mm] 6 10 15 20 25 32 40 m m x g x x m x g x y 19 21 25 27 33 40 49 m x g x x m x g x y m x g x (z + A) m x g x x m x g x (z + A) m x g x y M1 M2 M3 Static moment A: Distance between the center of the guide shaft and the upper surface

MXS Series Air Slide Table

Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58

ITV

Output pressure (kPa) G 20 0.5 0.5 Return PPA 40 0 0 Out AL 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (% F.S.) Input signal (% F.S.)

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

Cylinder with Lock

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 20 MWBW Series Dimensions Basic: MWBWB (Rc, NPT, G) BP GD GB GB Unlocked when pressurized GC GD GB GD (Rc, NPT, G) P Rod side cylinder port GC GA (Rc, NPT, G) P Head side cylinder port GE W GE W GE W (Rc, NPT, G) BP GF GA Manual lock release bolt Width across flats KC Cushion valve 32 4 x J Width across flats KA Thread depth MC Width

REC

range 1 8 1 8 1 8 1 4 20 M20 X 1.5 150 to 700 146 20 8 21 215 M26 X 1.5 25 150 to 700 146 20 8 25 219 M26 X 1.5 32 150 to 1000 159 20 8 25 232 M32 X 2 40 200 to 1000 181 23 10 27 264 4.9-10 Sine Cylinder Series REC REC F/Front flange H2 2-Rc(PT)P Width across flatsB2 2-NN G G I H1 Width across flatsB1 Relieving port M5 X 0.8 Standard port Relieving port MK/MK2 2-Eh8 FY D B RSQ/RSG MM AL 4