Electric Slide Table / High Precision Type 《 AC servo motor 》

255 79 to 157 154 to 308 98 to 197 192 to 385 Max. speed[mm/s] 400 200 400 200 400 200 Actuator specifications Pushing speed [mm/s] *2 35 or less 30 or less Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw(In-line) Actuation

0.4

.16 stations 16 Note) 16 stations With DIN rail bracket (Without DIN rail) Note 1) Refer to page 419 for details.

Electric Actuator Triple Axis P&P Unit

10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 13 Electric Actuator/Maintenance Guide 1 Be sure to read before handling.

AC Servo Motor Driver (CC-Link Type)

Monitor data 1 lower 16 bit (RWrn) : Lower 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 1 upper 16 bit (RWrn+1) : Upper 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 2 lower 16 bit (RWrn+5) : Lower 16 bits of data demanded by Monitor 2 (RWwn+1) Monitor data 2 upper 16 bit (RWrn+6) : Upper 16 bits of data demanded by Monitor 2 (RWwn+1) A sign is set if data does not

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

Thermo-chiller

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option) (Only 200 V as an option) Indoor use Electrical box: IPX4 CH1 0.1 15

SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

LEKF-OMZ0035

32 40 S2 100 25 LECSA-S1 R Right side parallel AC servo motor S3 200 32 LECSA-S3 Incremental L Left side parallel S4 400 40 LECSA2-S4 encoder Lead[mm] LECSB2-T5 Symbol LEKFS25 LEKFS32 LEKFS40 LECSC2-T5 T6 100 25 LECSN2-T5H 20 24 30 LECSS2-T5 A 12 16 20 LECSB2-T7 B 6 8 10 AC servo motor LECSC2-T7 T7 200 32 Absolute encoder LECSN2-T7Stroke LECSS2-T7 50 50 LECSB2-T8 to to LECSC2-T8 T8 400 40

LEY-OM007

] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg)

VQZ1000/2000/3000

VQ2000FPG-FB 01 1 station 0.8 to 1.0 Nm 16 16 stations VVQ2000-FPG-066 stations manifold VQ2000-FPG-C6C6-D: 3 sets VQ2000-FPG-C8C8-D: 3 sets Double check block Note) It is the tightening torque for mounting a bracket for the perfect block.

Table of Contents

80 MB 63 300 600 Stroke (mm) AS5000-02 AS420-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

, 90+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 15+55 1.26 (1.30) 1.81 (1.86) 2.79 (2.84) 4.93 (5.08) 6.79 (6.99) n=2, 4, 6, 8, Flange 2 (Dif. / same side(s)) Standard weight 90 100 110 120 20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16,

OMU0023

of read outputs: 16 bits (10h) 12 1 (Number of bits) 13 0 Calculated 14 value Checksum(LRC) 15 Calculated value 16 End code CR 17 LF Note 1: The maximum value is 456 bits.

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

Modular Design with Uniform Body Style

300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.7 MPa 0.01 0.01 0 0 0 600 400 200 800 1000 0 100 200 500 400 300 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 72 AFM20-D to AFM40-D Series AFD20-D to AFD40-D Series Dimensions

Sine Rodless Cylinder Series REBR Direct Mount Type

, 500 750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.

VQ7-6/7-8

AXT632-45-14 AXT632-45-16 AXT632-45-17 AXT632-45-18 AXT632-45-19 No.

5 Port Solenoid Valve SY Series

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series MB/CA2 Pressure 0.5 MPa Load

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SI unit 3 stations 4 5 6 7 8 9 10 11 12 13 14 15 16 stations Stations L1 148 173 198 223 248 273 298 323 335.5 360.5 385.5 410.5 435.5 460.5 L2 137.5 162.5 187.5 212.5 237.5 262.5 287.5 312.5 325 350 375 400 425 450 L3 120 144 168 192 216 240 264 288 312 336 360 384 408 432 L4 14 14.5 15 15.5 16 16.5 17 17.5 12 12.5 13 13.5 14 14.5 L5 90 114 138 162 186 210 234 258 282 306 330 354 378 402