Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

REA/REB

-2-10.)

REA/REB

-2-10.)

0.4

VVQ2000-3A-1<U-Side End Plate Assembly> y U-side end plate assembly no.

VQ4000

Cylinder port U D U D C8 C10 C12 02 03 B CM With One-touch fitting for 8 With One-touch fitting for 10 With One-touch fitting for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed Refer to page 2-5-2 (Grommet type) for wiring specifications.

Smooth Cylinder/Low Speed Cylinder

D-M9A D-M9V Qty. of auto switches mounted D-A9 D-M9 D-P3DW Note 1) 5 10(5) 15 (10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.

7

Flat terminal C L T 52.5 (58) 52.5 (58) 99.5 U V T 58.5 (64.5) U T U 10, 3/8", 12 91 (97) 22.5 3 A VXD2 68.5 47.5 23 30 45 20 6 13.5 41.5 25 33 Model Mounting bracket dimensions One-touch fitting P a b d e f 10, 3/8", 12 58 65 67 52 25.5 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions. 139 VXD Series For Air/Water/Oil 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless

ISO Cylinder

11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

Air Cylinder

Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

Battery-less

4 u u !2 !3 i e !5 r t w q y !6 !

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Air Slide Table

Double-ported type Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6A-Zmm(6, 7, 8, 9) u u v v v MXQ8A-Zmm(6, 7, 8, 9) u u v v v v MXQ12A-Zmm(6, 7, 8, 9) u u v v v v v MXQ16A-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20A-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25A-Zmm(6, 7, 8, 9) v v v v v v v v v Adhesive application points Height interchangeable type Auto Switch Mounting Made to Order Model Selection

5

Head flange: MBYG Port 4 x FD FB FY ZZ + Stroke FT FZ FX Head Flange (mm) Bore size (mm) FB FD FT FX FY FZ ZZ 32 50 7 10 64 32 79 141 40 55 9 10 72 36 90 145 50 70 9 12 90 45 110 164 63 80 9 12 100 50 120 164 80 100 12 16 126 63 153 202 100 120 14 16 150 75 178 202 Single clevis: MBYC Port CDH10 U L CX ZZ + Stroke Z + Stroke RR Single Clevis (mm) Bore size (mm) CDH10 CX L RR U Z ZZ 32 10+