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Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

SY

SS5Y71, #1 + #10 M type plug connector .

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

Electric Actuator/Slider Type

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load

ZP

Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.

ZP

Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075 x 1 m SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN200-02 AN200-02 AN202-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1

Electric Actuators

m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 10 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PC Scale: 10% When two dimensions are shown, the top

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The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

MY1

20 50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

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amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

ZP

Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.

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(mm) 4 6 8 10 12 M I.D.

Auto Switch Guide

CX 10-20-47 CY Direct Grommet 10-20-48 D-Y7NWV/Y7PWV/Y7BWV MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-M5NW/M5PW/M5BW D-H7NF D-G59F D-F79F D-F59F The output signal can be detected in an unsteady detecting area. 10-20-49 10-20-50 RHC Solid state switch

V100

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 10) For an actuator with lock, add the power consumption for the lock.

CATALOG

10 15 15 M 8 x 1.25 6 M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40 1/2 126 0 Bore Size (

Smooth Cylinder/Low Speed Cylinder

+ 15 (n-2) (n = 4, 6) Note 5) D-A79W 15 10 D-F7 D-J79 15 + 15 (n-2) (n = 4, 6) Note 5) 5 5 D-F7V D-J79C D-F7W/J79W D-F79F D-F7NT 10 + 10 (n-2) (n = 4, 6) Note 5) 5 5 15 + 20 (n-2) (n = 4, 6) Note 5) 15 10 10 + 15 (n-2) (n = 4, 6) Note 5) D-F7WV 15 10 Note 4) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

Battery-less

Mer m 200 200 200 200 0 0 0 0 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 0 5 10 15 20 25 30 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 5 10 15 20 25 30 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load