High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

SQ1000/2000

SUP/EXH block Note 1) SSQ2000-PR-3-C10-(S) Back pressure check valve Note 2) SSQ2000-BP SUP block plate SSQ1000-B-R EXH block plate SSQ2000-B-R Port plug Note 3) P R A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) Note 4) 4 (5/32") One-touch fitting C6 (N7) 6 (1/4") One-touch fitting C8 (N9) 8 (5/16") One-touch fitting Single wiring

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Title not found

l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

15

Contents 6 CYS06-37 -AJ024-R CYS06-37AAJ024-R 10 CYS10-37 -AJ025-R CYS10-37AAJ025-R 15 Set of the nos. 25, 26, 33 Set of the nos. 34, 41 Set of the nos. 37 BMY3-016 20 CYS20-37 -AJ027-R CYS20-37AAJ027-R 25 DCYS25-37 -AJ028-R 32 CYS32-37 -AJ029-R CYS32-37AAJ029-R 40 -X Note 3) A switch spacer, as specified in the table above will be required if an auto switch is mounted afterward.

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Modular Type Lubricators Series AL

Check the dripping amount once a day. Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

, PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 2-wire 24 V 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire IC circuit 3-wire (NPN) Terminal conduit 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color

240

LZ LC3F2 T4 = 0.2 [s] Calculation example) T1 to T4 can be calculated as follows. 200 T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 160 Overhang: L1 [mm] T2 = = = 0.033 [s] L 0.5 V (T1 + T3) V 20 0.5 200 (0.067 + 0.067) 200 120 T4 = 0.2 [s] 80 Therefore, the cycle time can be obtained as follows.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

100 V, 200 V 12 V 2-wire 24 V CJ1 No 200 V or less Relay, PLC Yes Connector 24 V or less 5 V, 12 V No IC circuit CJP Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) IC circuit CJ2 5 V, 12 V Grommet 12 V 2-wire CM2 Connector 3-wire (NPN) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 3-wire (PNP) 24 V CG1 Courtesy of Steven

OMR0032

A circuit to which power is supplied by a secondary coil of a insulated transformer that meets the following conditions Maximum voltage (No load): 30 Vrms (42.4 V peak) or less Maximum current: 8 A or less (including short circuit) Limited by circuit protector (such as fuse) with the following ratings Voltage without load Maximum current (V peak) rating (A) 0 to 20 V 5.0 Over 20 [V] up to

Compact Type

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

100

VAC 4 DC Nil 300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm Supply valve/ Release valve w Rated voltage DC CE-compliant AC (50/60 Hz) CE-compliant 5 24 VDC V 1 100 VAC 6 12 VDC V 2 200 VAC V 6 VDC V 3 110 VAC [115 VAC] S 5 VDC V 4 220 VAC [230 VAC] R 3 VDC V x How to Order Vacuum Pressure Switch * CE-compliant: For DC only A M L ZL ZSE30A 00 e Electrical

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction

Air Slide Table

m [kg] V = 50 1.5 V = 100 V = 150 1.0 V = 200 0.5 0.0 0 20 40 60 80 100 120 140 Allowable overhang L [mm] MXQ16(A)-10, 20, 30Z MXQ16(A)-40, 50Z 4.5 4.5 V = mm/s V = mm/s 4.0 4.0 3.5 3.5 Load mass m [kg] Load mass m [kg] V = 50 V = 50 3.0 3.0 V = 100 V = 100 2.5 2.5 V = 150 V = 150 2.0 2.0 1.5 1.5 V = 200 V = 200 1.0 1.0 0.5 0.5 0.0 0.0 0 10 20 30 40 50 60 70 80 90 0 10 20 30 40 50 70 60 Allowable

IIIIIIIIII

/min. (14 LPM) with outlet 5 PSI (34.5 kPa) above setpoint RECOMMENDED FILTRATION 5 micron R-810 Series REGULATOR TYPE Non-bleed, non-relieving Note: R-810 series regulators are not recommended for dead-end, no flow applications. A downstream relief of at least 20 cc/min is recommended.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

125 100 261 100 35 123 284 160 108 290 120 38 131 313 92 Series CHA Dimensions Foot type: CHAL H 2-Rc P K F GA A MA T a M GB V Cushion adjustment screw Air release 4-J R (max.)