MLGC

style. 3.2-10

STAINLESS STEEL CYLINDER

Air Cylinder Speed controller Solenoid Regulator Air source Air filter Fig. 10 Basic Circuit 24 5.

CG1-OM0227

AF AR 1) 5 2) 3) 5 4 4) 1 ( )ISO VG-32 2-2. 1) 2) 3) 4) 5) 6) 7 8) 9) 10) 3 1) 2) 3) 4) 5 5) (40) 2-3. 1) 2) 1) 1 P10[3. ] () (fR)[N] [mm] 1. 6 (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) ( ) 5) 6) 7)()1 1 Nm CG120 1.5 1.52.2 CG125 2.9 2.53.5 CG132 2.9 6.08.6 CG140 4.9 10.814.6 CG150 11.8 1925 CG163 24.5 3040 CG180 24.5 --CG1100 42.2 --8) 9) 10) 11) 12) 7

CG1x-OM0006N

AF AR 1) 2 3 1) () 2) 5 3) 4) 5 5) 6) 7 2-2. 1) 2) 3) 4) 5) 6) 7) 8) , 9) 10) 3 11) 12) () 13)/ 14) 8 1 P142. 2 3 4 5 6 7 2-3. 1 2) 3 4 5 9 1 P14[2. ] fR[N] [mm] 1. 2 3 10 4 51 1.

RS2H-OM0045P

AF ,AR , , , ,1 ISO VG32. 5 , 5 8 - 3-2. 1 B 1 3 3-3. 3-4. 9 - () 3-5. ,, (-)90 , 5.2 Nm A 10 - 3-6. ,,, RS2H5079Nm RS2H63801214Nm -5 3-7. M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2.

ARJ1020F

Manifold Base (Option)/Dimensions VBA VE VY G AL Stations Manifold base part No. 4 6 10 A dimension B dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 1.5-4

90

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

MHx-OMM0057

1.5~2 SMC AF AR 4. 4-1 13 - 4-2 1 15 2 16 3 17 B 4 18 5 19 6 20 7 21 U 8 22 R 9 A 23 C 10 B 24 11 A 25 12 13 14 MHL2-10D MHL2-16D MHL2-20D MHL2-25D MHL2-32D MHL2-40D 26 27 28 29 30 NBR MHL10-PS MHL16-PS MHL20-PS MHL25-PS MHL32-PS MHL40-PS ) 262627282930 1 14 - 4-3 1 U U 2 R B B R 3 15 - 4-4 1 2 O O O 3 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku

3 Way,3 Port Solenoid Valve NVZ Series

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

NVZseies

R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base. ''P" port of maniljold base will be the exhaust port. NW4Zl-'?jjD 1 -? o*, "."o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold.

Air cylinder

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC. With magnet built in: -10 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Stroke length tolerance Cushion Rubber bumper Piston speed 50 to 750 mm/s Warning Confirm the specifications.

CM2x-OM0230Q

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 50~750 mm/s () 2. 2-1. AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1.

rep-modular-e

Round cutting pliers Nominal: 125 or 150 Tightening torque: 1.4 0.1 Nm 10) Mount the bowl assembly. Hold the bowl assembly by hand and rotate clockwise. Do not use tool for mounting because the bowl may be damaged. Refer to the Check item for referential tightening torque. Actuators Modular F.R.L.

MGC

(mm) Operation direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGF OUT 62.8 94.2 126 157 188 220 251 283 314 314 20 8 IN 52.8 79.2 106 132 158 185 211 238 264 264 CY1 OUT 98.2 147 196 246 295 344 393 442 491 491 25 10 MY1 IN 82.4 124 165 206 247 288 330 371 412 412 OUT 161 241 322 402 482 563 643 724 804 804 32 12 IN 138 207 276 346 415 484 553 622 691 691 OUT 252 378 504

VFS4000-OMY0001

, 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Round cutting pliers Nominal: 125 or 150 Tightening torque: 1.4 0.1 Nm 10) Mount the bowl assembly. Hold the bowl assembly by hand and rotate clockwise. Do not use tool for mounting because the bowl may be damaged. Refer to the Check item for referential tightening torque. Actuators Modular F.R.L.

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter