IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Intrinsically Safe Valve

with cover (LL) 53-SY5 40(R)-LL-02 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 34.5 37.2 84.3 Terminal type (TT) 53-SY5 40(R)-TT-02 3 4 5 Max. 10 189.6 L (Lead wire length) Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 101.1 25 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7140(R)-

VZS

For details, refer to pages 3-7-19 and 3-7-20.

LX Series Compact Electric Actuators

[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?T,,*l ffi swltch type Screw lead Origin point switch Wilh (Wire length: d.3m) Origin Home Switch Informalion LX series acluators are available with an optional photo micro sensor as an origin home switch to detect when the acluator is fully retracted.

ITV

Approx. 172 Applicable products and accessories Applicable model ITV ITV20 ITV30 q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) AF30 AF40 IC AFM30 AFM40 B310L B410L VBA Y30 Y40 234 Y30L Y40L VE qAF40 wAFM40 VY1 G Accessory (Option)/Part No. PPA AL Flat bracket Dimensions Part no.

240

6N q w e r t y u i o !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

MB

ZZ ZZ L CX Z RR CZ U Z CDH10 32 40 50 63 80 100 to 500 23 14 172.5 180.5 170 10.5 28 13 162 10 to 500 23 14 182 195 184 11 28 13 171 10 to 600 30 20 209 221 206 15 40 17 194 14 U to 600 30 20 209 221 206 15 40 17 194 14 CX to 800 42 30 269 287 264 23 60 26 246 22 L RR Z + Stroke CZ to 800 42 30 269 287 264 23 60 26 246 22 ZZ + Stroke Center trunnion(T)/Locking at head end (-H) -H -R/ -W

VFR

L R L R Note) L: U side mount R: D side mount EXH block disk When valve exhaust affects the other stations in the circuit, insert EXH block disk in between stations to separate valve exhaust. Body type Plug-in type Non plug-in type AXT625-12A Part no.

3

Low temperature operation 1) The valve can be used in an ambient temperature of between 20 to 10C.

E-P HYREG

IRV 2 VEX 1(P) 3(R) 2(A) Simplified main circuit n SRH SRP 1 SRF 3(R) 2 ITV Simplified pilot circuit 1(P) 2(A) P2 P1 3(R) 1(P) IC 1(P) 2(A) n E-P HYREG Ease of handling ITVH Having the amplifier built into the electro-pneumatic pilot valve, only an external power supply and signal (voltage, current) need to be connected.

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

, 30, 40 How to Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Nil E Side ported Axial ported Size 10 15 With auto switch Size: 10, 15 T99 L 180 S CDRBU2 10 W CDRBU2 20 W 180 S T79 L With auto switch Size: 20, 30, 40 Size 20 30 40 Made to Order Refer to the table below for details.

AC Servo Motor Driver (CC-Link Type)

When the motor mounting position is right side parallel (LEFS*R) or left side parallel (LEFS*L), the rotation direction PA14 selection is 0(+: Counter motors side). -25- Recommended Value of acceleration time constant of Point table No.1 [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Point table No.1 Initial value Recommended Value Home position

Series KP/KPQ/KPG

26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for R threads after installation

Series KP/KPQ/KPG

26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for R threads after installation

KP/KPQ/KPG

26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads

SYJ3000/5000/7000

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 1.2 (PE port) 14 M3 x 0.5 (P, R port) L plug connector (L): SYJ3 20-L-M3 (-F) M8 connector (WO): SYJ3 20-WO-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5