High Purity Fluoropolymer

Model M E L M H t W1 W2 K J 1/8 LQ1P11 LQ1P12 LQ1P21 LQ1P22 LQ1P31 LQ1P32 LQ1P33 LQ1P41 LQ1P42 LQ1P51 LQ1P52 LQ1P61 LQ1P62 4 3 6 4 10 8 6 12 10 19 12 25 19 Class 1 11.5 6 11 13 44 10.5 8 10 16.5 15 17 55.5 14.5 8 6 14 15 J Panel thickness (Max. t) 23 21 24 69 20.5 8 7 17 20 W2 W1 M 28 26 28 78.5 24.5 8 7 21 24 1/4 (E) (E) H 39 39 43 100 36.5 9 9 26 29 (L) Class 2 to 5 Panel aperture K 49

MQQ

, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30

80

15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 2 x J thread depth K VCH VDW VDW Body material Stainless Steel SX10 2 x 3.4 Mounting hole W Y Grommet VQ LVM X U D 300 Q F Full wave rectifier (AC type) [mm] C R E G Mounting method Model Port size P A B B1 C D E F J K M VDW1 M5 12 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 15 22 11 51.7 20 8 13.5 M3 5 15 B B1 2 x P Port size A Mounting bracket

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

CHKD/CHKG

Rod end thread type is an optional product. (Refer to page 281).

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/4 200 204 265 132 320 18.5 M18 x 1.5 M40 x 1.5 63 60 162 45 20 41 115 70 39 48 17 24 25 Up to 1200 3/4 1 225 226 280 150 335 18.5 M20 x 1.5 M45 x 1.5 63 182 20 60 50 46 115 39 74 48 17 24 25 Lube Non-lube Up to 1200 Data 275 277 355 180 420 23 M24 x 1.5 M56 x 2 71 225 25 67 60 140 56 49 86 60 20 29 30 Up to 1200 330 330 400 212 475 23 M30 x 1.5 M64 x 2 1 80 270 30 76 70 65 140 49 96 60 20

Floating Joint

If it is forcefully disassembled, it could lead to damage. 1156 Floating Joint: Stainless Steel Type JS Series Construction 10, 16 20 to 63 J J Component Parts Component Parts No. Description Material Note No.

Electromagnetic Digital Flow Switch

Analog 1 to 5 V K Analog 4 to 20 mA * When using this switch in combination with an LFE0, select output specification J.

Compact Cylinder

4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20

VEX1

i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4 50 25 10

MLGP

63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load

MLGP

63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load

LEF-OM002xx

to 760 10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

C85

Lubrication CG1 Piston speed 50 to 1500 mm/s Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable kinetic energy 0.02 J 0.03 J 0.04 J 0.09 J 0.27 J 0.4 J MB Front side mounting Stroke tolerance 0/+1 0/+1.4 MB1 CA2 Weight (g) CS1 Bore size (mm) 25 20 16 12 10

Title not found

Note 5) For command pulse input with an open collector method.

MXW

33 20(Y) (Y) 6H9 +0.030 depth 5.5 0 L Data 10 20 20 K A 43 31 23 A 3 Z N-M6 x 1 thread depth 12 (N 1) x H G NN-M6 x 1 thread depth 12 Bottom through-hole 5.1 HH Bottom through-hole 5.1 GG H 7 depth 5.5 6H9 +0.030 0 F E 6H9 +0.030 depth 5.5 0 (mm) Model G F E Z NN N L K J HH H GG MXW16-125 99 157 110 345 1 5 64 43 141 45 31.5 MXW16-150 124 176 136 395 1 5 89 68 166 50 24 MXW16-175 151.5

CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

17

support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.