Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

4 x M2.5 x 0.45 thread depth 2.5 12.5 K Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16

10

x J K B C CM3 CG1 CG3 Positional relationship between port and cushion valve JMB Port MB MB MB1 CA2 Cushion valve CS1 CS2 [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA KB 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 12.2 10 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14.2 14 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 19 18 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25

Fieldbus System

3/5 E 3/5 33.4 29.1 4 A 4 A 4 A 4 A 4 A 12.4 14.1 8.7 One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 10, 3/8" (For DIN rail mounting) (Pitch) P = 16 (20.5) 20 18 Note 1) These figures show the SS5Y5-10S6Q22-05D-C8.

Table of Contents

2) A(2) AQ Weight (g) (g) Model Min.

Modular Type Filter Regulator Series AW

or less for current output) *Pressure gauge port size: 1/8 How to Order 03 30 1N AW F K B A X465 Filter regulator Switch specifications Body size Symbol A B C D Output specifications NPN output PNP output 1 to 5V output 4 to 20mA output 20 30 40 With back flow mechanism Nil K With back flow machanism With digital pressure switch (Series ISE30) Note 7) Thread type Note 7) Optional parts

modular-press-e

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

Modular F.R.L. Pressure Control Equipment

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REAH10 REAH10 REAH10 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 0.5 1.5 2.5 0 0.5 1.5 0 1.0 Moment (Nm) Moment (Nm) REAH15/20/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25

REA/REB

N N Z + Stroke REAS15 (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 REAS25 10 11 6.5 26.4 16 8 14 4 7 8.5 70 54 40 20 REAS32 12.5 14 8 33.6 20 8 16 5 7 9.5 86 66 46 24 REAS40 12.5 14 8 41.6 25 10 20 5 10 10.5 104 76 57 25 HP HS HT J x K L LD M MM N NN Model REAS15 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

CNG

steel 25, 32 only 55 19 Steel ball A Carbon steel Cushion seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion

MY1

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

JXCx-OMU0004

1800 110 1800 15 120 2000 120 2000 55 No.JXC-OMU0004-A 10.3 LES LES LES [mm/s] 20 2] 100 [mm/s [mm/s] 20 2] 500 [mm/s [mm] 1 3 LESH**J 20mm/s LESH**K 10mm/s LESH8R LESH16R LESH25R J K J K J K 4 6 15 23.5 43 77 7 10.5 25 39 71.5 128.5 [N] 10 15 35 55 100 180 *20%F.S.

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

Prevents Micro-Bubbles

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

Cylinder with Lock Series CNG

steel 25, 32 only 55 19 Steel ball A Carbon steel Cushion seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Use a single knuckle joint or a double knuckle joint individually.