ARM10/11

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

LJ1H

Mep a = 1000 2000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) L3 (mm) m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

LX

(A contact) N.O. (A contact) Specifications N.O. (A contact) N.O.

0.4

A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 20 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 (L3) (L4) 150.5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A AL H1 H1 l 10.2 AL A K F N BN C B h + l ZZ + l + 2 stroke H S + Stroke H + Stroke ZZ + 2 stroke With rod boot on both sides ZZ + 2 l + 2 stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108

C76

type (A) Band mounting type (B) or non-magnet CP95 ZZ + Stroke NCM C76KE Non-rotating, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) BE AM 20 24 C 12 14 D 37.5 46.5 FA 30 35 FB 14 16 K 10 12 KA KK KV 38 50 KW 7 8 TDH9 TW 34.5 42.5 WH 38 45 Eh8 EE G 9 12 H 58 69 HR N 17(19) 22(25) NB 34.5 42.5 S 68 89 XB 47 57

C76

S + Stroke H MB Band mounting type (B) or non-magnet Rail mounting type (A) ZZ + Stroke MB1 CA2 CS1 C76KF Non-rotating, Piston rod (Rubber cushion only) With rod boot C76 C85 Wh K KK C95 KA CP95 C e NCM Rod cross section NCA AM 9 9 f I Dh -X 20Data (mm) AM 20 24 C 12 14 FA G H HR K KA KK KV 38 50 TDH9 TW 34.5 42.5 BE D 37.5 46.5 KW 7 8 WH 38 45 Eh8 EE N 17 22 XB 47 57 NB 34.5 42.5 ZZ 126

CNA

GL GR D E MLGC Q T H1 AL A H S + Stroke ZZ + Stroke CNG N K F M M BN W V MNB C B CNA CNS With rod boot CLS CLQ e MLGP 8 f l RLQ ZZ + l + Stroke h + l MLU ML1C DBore size (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA -X 40 50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95

CNA

K F H BN S + Stroke ZZ + Stroke C 8 f l CNA N TT B TX TZ h + l ZZ + l + Stroke CNS CLS Bore size (mm) Stroke range (mm) MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 CLQ 40 50 63 80 100 M14 x 1.5 27 6 M8 x 1.25 14 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 25 to 500 M18 x 1.5 30 7 M8 x 1.25 18 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 25

SQ1000/2000

A 1 () Station 1 SOL. A Station 2 14 () SOL. A Station 3 2 () 1 SOL. A Station 4 14 15 () 2 15 SOL. A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

MY1

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA

CRQ2

10, 15, 20, 30, 40 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com K 20, 30, 40 CRA1 10, 15, 20, 30, 40 CRQ2 20, 30, 40 MSQ XA38 K 10, 15, 20, 30, 40 K J XA45 K K MRQ DCombination Chart of Made to Order 20Chart 4.

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X G Seal Y200T Y400T J F A H K Spacer width D Applicable model F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50

CM2

CJ1 CJP CJ2 CM2 U1 A H MM NDH10 U1 NX1 Z R2 Y Bore size (mm) 20 25, 32 40 Applicable bore size (mm) 20 25, 32 40 NDH10 R1 A A1 NX E1 L1 MM Part no.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

Compact Manifold Regulator

Common Supply Type Construction OUT IN ARJ AR425 to 935 ARX SMC AMR K P C U O S L H ARM ARM t e A-A A ARP w y IR-A IR r IRV i VEX SRH !

Pin Clamp Cylinders

the port CKQ Arm 7 A B 5.5 2 x Rc1/8 68 28 Port Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 7.5 075 7.6 076 7.7 077 7.8 078 7.9 079 8.0 080 11.5 15.5 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 8 6 20 12 8.5 20 16 11.5 25

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A