Cooling Capacity: 100 (10.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: M (Applicable to DI Water Piping)
Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 (3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz)), Option: M (Applicable to Deionized Water Piping)
Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)
Cooling Capacity: 38 kW, Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, with Rc-NPT Conversion Fitting, Power Supply: 50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC, Option: Applicable to Deionized Water Piping
Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
1 AXT100-FC26-1 1.5 m AXT100-FC20-1 AXT100-FC10-1 AXT100-FC26-2 3 m AXT100-FC20-2 AXT100-FC10-2 AXT100-FC26-3 5 m AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM.
Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.
10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).
) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16
Extension stroke end adjuster Retraction stroke end adjuster MXQ8A-m-X2192 31.5 41.5 17 25 5 11 13 8 3 13 16.6 18.2 M6 x 0.75 2.5 MXQA-AS8-X2202 MXQA-AT8 MXQ12A-m-X2192 36.5 46.5 18 27 6.5 11 16 10 4 16.2 18.9 20.7 M8 x 1 2.5 MXQA-AS12-X2202 MXQA-AT12 MXQ16A-m-X2192 41.5 51.5 20 28 8 11 17 12 5 20 25.2 26.9 M10 x 1 3 MXQA-AS16-X2202 MXQA-AT16 MXQ20A-m-X2192 48.5 58.5 22 31 10 12 20 17 6 27
stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.
Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).