VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

I

Arntient and tluid temperatureMax .120'F(Max. 50'C) Respon time 2 poitl'| slngle/doubb 20ms or less at 75 PSI (skg/cm'?) 3 pcition 40ms or less at 75 PSI (skgf/cm'?)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

130 178 209 268 3 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal Series XMC, XYC How to Order XMC XYC M9N A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.

C76

3 !4 !5 !6 !7 !

C76

3 !4 !5 !6 !7 !

asilltr

1Vt 1 % 2% 3 4 v3 3l t h a 1 % z 2y, 3 Series NCQT D Aulo-swiich capable Switches (see page 16) Type of Aulo Switch (Rail Mounted) Wiiilut Auto witch : Female Rod (Stid.)

3

Digital display allows visualization. 3-color/2-screen display, Improved visibility Remote control is possible with accumulated pulse. 1 Flow Switch Flow Rate Variations Applicable flow range [L/min] Series Minimum setting unit Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 0 3 Thermal type (MEMS) Air N2 0.5 0.5 1 1 3 3 Applicable flow range [L/min] Minimum setting

Air Cylinder NCQ7 Series Compact Cylinder

% 1Vt 1 % 2% 3 4 v3 3l t h a 1 % z 2y, 3 Series NCQT D Aulo-swiich capable Switches (see page 16) Type of Aulo Switch (Rail Mounted) Wiiilut Auto witch : Female Rod (Stid.)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

:DXT20O-3-1A aln case of the base mountd type, the outlet of the 3 port valve is the B port of the manifold bas6, | .Al j \ r ADplicable base NW5Z3-?

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:DXT20O-3-1A aln case of the base mountd type, the outlet of the 3 port valve is the B port of the manifold bas6, | .Al j \ r ADplicable base NW5Z3-?

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

C95Series

RnDoneaUme 1.2 mS 1.2 mS 1.2mS 1.2mS Solid State Switch Type Auto swttch model I).F59 D-F5P D-J68 D-J51 1 Wire type 3 Wire 3 Wire 2 Wire 2 Wire output NPN PNP ---Application Relay.

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, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa Power supply voltage 0 to 10 VDC Thread type 1/8 (1000 tuoe) 2 1/4 (1000. 2000 tvoe) 3/8 (2000 type) Without bracket I Flat bracket L-bracket

Peltier-type Chiller Thermo-con/ Compact Type

Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

MLGC

2 $0 $1 $2 $3 $4 $5 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 SUS for 20/25 Hard chrome plated Chromate Nitrided Nitrided (2) Nitrided Heat treatment Nickel plated (3) Dacrodized For spring lock and spring/air pressure lock Brake spring Spring steel wire !3 Oil impregnated sintered alloy Oil impregnated sintered alloy Bushing 40: Zinc bronze die casted !4 Bushing 40: Zinc bronze die casted !

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Wiring (output) Electrical entry Applicable load Type 5 (Z) 3 (L) Special function None (N) 0.5 (Nil) DC AC 3 wire (NPN equiv.)

D. P. Lube ALD600/900 Series

The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air 1.5 MPa Proof pressure Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)

PFMC.eng

M4 screws 2 OUT2/Analogue output/External input White 3 Blue DC(-) 4 Black OUT1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved PF-OMS0004

Air Cylinder MGQ Series Compact Guide Cylinder

TYPe d beains 3 tandard s 'qo ' okd ( fYnI ro r r 2.9r 2 3 . 40' I lo , ?

ZK2-C

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.