High Vacuum Angle Valve, XL Series

Load voltage at ON = x 2 pcs.

AC Servo Motor Driver (CC-Link Type)

At this time, Monitoring (RXn8) turns to ON at the same time.

Slider Type/Ball Bushing Bearing

(mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 Moment (Nm) 25 25 25 5 10 15 20 0 5 10 15 20 0 Moment (Nm) Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 CY1HT25 CY1HT32 CY1HT25 CY1HT25 CY1HT32 0.05 CY3B CY3R 0.03 0.04 Deflection (mm) Deflection (mm) 0.02 CY1S 0.03 0.02 CY1HT32 CY1L 0.02 0.01 0.01 0.01 CY1H CY1H 20 40 0 60 20 40 0 60 20 40 0 60 80 CY1F Moment (Nm) Moment (Nm) Moment (

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

SMC Electronic Switch Series Variations

How to activate the Autoshift function Pull the AUTO-SHIFT input to GND for at least 10[ms]. The Autoshift feature is activated by the rising flank of the Autoshift input. The Display and Setpoints are now based on the pressure at the moment of release after Autoshift input. Example: The figure below is based on the condition of set values as P1 = 40[kPa] and P2 = 20[kPa].

Rotary Table

Rotating angle at which the shock absorber acts (External shock absorber type) Size 10 20 30 50 70 100 200 For low energy 7.1 6.9 6.2 9.6 For high energy 8.6 8.0 7.3 10.5 Mass Table 4.

0.4

Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

Single Axis Electric Actuator Series LJ1H

Page 319 Features 14 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12

42

Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

Fluoropolymer Tubing Variations

0.08 4.7 60 40 1.0 0.64 0.29 0.12 6.9 35 20 1.0 0.45 0.21 0.09 4.9 35 20 Max. operating pressure (MPa) Burst pressure (MPa at 20C ) Recommended radius Min. bending radius (mm) Tube close bend radius 260C Super PFA Max. operating temperature (Fixed use) Material Note 1) When using the product at a temperature other than those shown in the table above, use it at a maximum operating pressure

NCQ8

(Not available 20" (0.5 m)) Note 3) For solid state switches with flexible wire specification, add 61 at the end of the lead wire length. Note 4) Robot cable is available as standard for D-M9.

RB/RBL/RBQ

Type of impact Cylinder stroke at load (Horizontal) RE A B Cylinder stroke at load (Horizontal) Cylinder stroke at load (Downward) Cylinder stroke at load (Upward) Conveyor stroke at load (Horizontal) Free dropping impact Rotating impact (With torque) REC Shock absorber 1.

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

15 12 170 80 80 50 50 12 5.5 10 185 190 90 20 20 87 28 97.5 129.5 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 110 20 20 110 34 110 150 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16 6.5 14.5 220 230 132 25 25 136 40 120 160 75 150 14 120 178 35 16 205 110 60 60 20 25 20 230 140 Max. 8 Max. 157 Max. 25 Max. 160 Max. 157 Max. 224 Min.

e-Rodless Actuator

2.6 OUT () Blue 9.5 4 20 2-color Indication Type, Solid State Switch/Direct Mounting Type D-F9NW(V)/D-F9PW(V)/D-F9BW(V) For details about certified products conforming to international standards, visit us at www.poweraire.com.

7

VXZ Height Weight Class H/24 VDC Class H/DIN terminal Seal material: EPDM 7%Smaller 20%Lighter VXS (90 g) (7 mm) Approx.

MHZ

25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

point L = 20 mm, at center of stroke.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32