Set Flow: 10 (1~10l/min), Thread: Rc(PT), Port Size: 04 (1/2), Terminal Box: 8 [Terminal Box (For 24VDC, -COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)], CE-compliant: Q (CE-compliant)

Set Flow: 1~10l/min, Thread: Rc(PT), Port Size: 1/2, Terminal Box: 8 [Terminal Box (For 24VDC, -COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)], CE-compliant: CE-compliant

MK

Model Ah9 0 0.052 0 0.052 0 0.062 21 28 35 50 63 MK2l32-llF MK2l40-llF MK2l -llF Through hole & both ends tapped (standard) Model J H K L C D E F G lA B S T I M O P Q R U V X Yh9 Z N 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0 0.62 0 0.62 0 0.62 0 0.62 MK2B32 MK2B40 MK2B50 MK2B63 34 40 50 60 54 61 73 86 5.5 5.5 6.6 9 31.5 35 41 9 Depth 7 9 Depth 7 45 52 64 77 60 69 86 103 Rc(PT)1/8 12 12 15 15 30 30

Slider Type Ball Screw Drive/11-LEFS Series

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the Operation Manual for using the products.

ZP

The pad, mounting nut, fitting, and buffer plate are shipped together but do not come assembled. 86 Thin Flat Type ZP Series Basic Pad Dimensions/Models Single unit 10 to 16 w q ZP UT N 10 7 Model A B Y q Pad dia.

TABLE OF CONTENTS

Consult factory for technical data and detail prints. 2.39 (60.7) NPT 2.55 (64.8) WITH SLEEVE PORT ADAPTER 1.80 (45.7) 2 WAY OR 3 WAY FREE EXHAUST WITHOUT SLEEVE PORT ADAPTER SERIES OE20 EXPLOSION PROOF SOLENOID OPERATORS .86 (21.8) 132 THD.

Refrigerated Air Dryer

[ANR]) Rated inlet condition Model Refrigerant Port size 37F (2.8C) 45F (7.2C) 50F (10C) Page IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E 11 (19) 10 (17) 12 (20) NPT 3/8 16 (27) 15 (25) 17 (28) NPT 1/2 26 (45) 25 (43) 28 (47) 43 (74) 41 (70) 45 (77) NPT 3/4 R134a (HFC) 100F (37.8C) 100 psi (0.7 MPa) 62 (106) 59 (100) 65 (110) P. 90 to 96 80 (136) 71 (120) 86

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

ISO Cylinder

Weights [g] Bore size [mm] 8 10 12 16 20 25 C85KN 39 41 82 95 189 257 C85KE 41 43 86 98 194 262 Without magnet C85KF 37 39 77 85 174 240 C85KY 37 39 77 85 175 241 Basic weight CD85KN 39 41 83 95 193 261 CD85KE 41 43 86 99 198 266 With magnet CD85KF 37 39 77 85 178 244 CD85KY 37 39 78 85 178 245 Additional weight per 10 mm of stroke 2.3 2.5 4.5 5.5 8.7 12.2 Foot (1 pc.)

Thermo-chiller/Rack Mount Type

Q = qm x C x (T2 T1) r x qv x C x iT 60 = 1 x 10 x 4.2 x 103 x 2.0 60 = Q = qm x C x (T2 T1) 860 = 1400 [J/s] 1400 [W] g x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] 1 x 10 x 60 x 1.0 x 103 x 2.0 860 = qv: Circulating fluid flow rate Q: Heat generation amount Users equipment T2: Return temperature 120 [cal/h] 860 = 1400 [W]

WRF100

For details, refer to page 86.

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

Lightweight and Compact

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

CLS

66 82 70 102 CL1 82 98 86 Be sure to confirm operation after mounting.

Series VQ Metal Seal/Rubber Seal Body Ported

Description Note q Material No.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Environment

0 i o e r t q u !1 !2 !3 !

Guide Cylinder Series MGG

(mm) Mounting Bore size 20-MGG Bearing type Stroke X Y Q Bore size (mm) Copper-free 39 86 (94) 25 32 Specifications 46 96 (105) 29 40 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 57 109 (121) 31 50 Double acting Action 56 112 (124) 34 63 Air 68 137 (151) 46 Fluid 80 Maximum operating pressure 1.0MPa 68 138 (152) 47 100 Minimum operating pressure 0.15MPa (horizontal with no load) Dimensions

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS Series Workpiece mounting pitch: Same dimensions Table width Height q LEFS Series Height w Body mounting pitch: Same dimensions Body width The body bottom positioning pin holes have been standardized.

C76

9 @0 q w e r t y u i o !