VM

Push button (Mushroom) VM122-M5-30R/B/G/Y VM132-M5-30R/B/G/Y Panel mounting hole JIS Symbol 2 port 3 port 2-M5 x 0.8 depth 4 R port (3 port only) 0.5 MPa supply 4.9 mm P.T. 21 N F.O.F. 1.6 mm O.T. 2-4.6 mounting hole 6.5 mm T.T.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

5 Port Solenoid Valve, Series VQC

N.C. 2-position double (metal) 4-position dual 3-port valve (B) Coil voltage 4 2 A B B 24VDC 12VDC 5 6 Note) 1 5 3 P EA EB N.O. N.O. 2 2-position double (rubber) 4-position dual 3-port valve (C) 4 2 A B C C: Locking type (Manual) Function Note) 1 5 3 P EA EB N.C.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

4/5 Port Air Operated Valve Series SYJA3000 1

closed center (B) 2 (A) 4 (B) 2 (A) 4 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

surge voltage suppressor. 602 3 Port Solenoid Valve 10-SYJ300/500/700 Manifold Variations A port size With One-touch fitting Valve series A port location P, R ports size M3 M5 1/8 Applicable tubing O.D. 6 4 N3 N7 N9 8 10-SYJ300 Note) Top M5 x 0.8 Body ported Base mounted P.609 10-SYJ500 Top 1/8 P.620 Note) 1/8 10-SYJ700 Top 1/4 P.632 Note) M5 x 0.8 10-SYJ300 Side 1/8 P.609 Bottom 10-SYJ500

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

•

Q I>A F ' F Flat "" ,,"OD with rib G :M5 xO.8 G:M6Xl y " p Q I>A ~ . F Fiat A. ,,"OD withn b Modol M I>B e 0 E Modol M ',B . e 0 ' El ZPY4Ol! 40 43 1 8.5 :!as .as 6.5 3.3 itt,ion' ZPY1Ol! 10 12 12 22 38 3 1.7 H4{~1 14.5 5 1.8 ZPYSOl! 50 53 19.5 29.5 <7.5 6 8 7.5 3.8 N6 (~,1 16.5 7 2.5 ., 1~ 15 12 22 38 5 6 3 1.8 ZPY~ 16 18 12.\ 22.5 :!

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter A1 Bracket A e Unit specification r Piping specification Symbol Description Nil Units selection function*2 M SI unit only*3 P Units selection function (Initial value psi)*3 Symbol Description 02 R1/4 (M5 female threaded) N02 NPT1/4 (M5 female threaded) F02 G1/4 (M5 female threaded) C01 Rc1/8 A2 URJ1/4 (Face seal fitting) B2 TSJ1/4 (Compression fitting) ZS-46-B Panel mount

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

O.D.: 3.2 (VAC. port) KJS23-M5 Applicable tubing O.D.: 4 (VAC. port) KJS04-M5 Applicable tubing O.D.: 6 (VAC. port) KJS06-M5 16.5 15.5 16.38 15.3 15.6 KJL23-M5 KJL04-M5 8.4 9.3 Applicable tubing O.D.: 3.2 (VAC. port) Applicable tubing O.D.: 4 (VAC. port) 10.6 10 P port (for ejector) Applicable tubing O.D.: 4 (P. port) KJS04-M5 Applicable tubing O.D.: 6 (P. port) KJS06-M5 16.38 15.5 Applicable

VZ100/300/500

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flow Characteristics Port size Flow characteristics 1 2 (P A) 2 3 (A R) Manifold 1(P), 3(R) port 2(A) port b Cv b Cv C [dm3/(sbar)] C [dm3/(sbar)] Body ported For internal pilot VV3Z3-20-1 VZ32 1 8 0.47 0.43 0.13 0.74 0.32 0.19 M5 x 0.8 1 8 M5 x 0.8 0.71 0.98 0.71 1.00 0.68 1.00 0.52

Sine Rodless Cylinder Series REA/REB

thread length E TC X F WP WP GW GP QW PW 4 x LD D Piping port P Operating direction A 7 W K G Piping port P Operating direction B Piping port P (Plug) Operating direction B HS CR With switch rail Q + Stroke Z + Stroke HR Plug 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A 12.5 19.5 16 Plug REBR15 REBR15 REA (mm) A

Air Cylinder

Grease pack part number: GR-S-010 (10 g) CS2 Basic (B) P Bore size Stroke 20 25 20 CM2B P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 Width across flats B1 H1 H2 32 to 40 P Width across flats KA E (Head side pressure port) I G G NA D Q MM NN AL N N F K H A P QY NA ZZ + Stroke S

Rotary Actuator/Vane Style Series CRB2

DM5 x 0.8 M5 x 0.8 M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 65 Series CRB2BWU Dimensions: 40 (With angle adjuster) For single vane type: Figures show actuators for 90 and 180 when the B port is pressurized. For double vane type: Figures show the intermediate rotation position when the A or B port is pressurized.

REA/REB

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction

REA/REB

B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

Fieldbus System

56.6 73.2 BUS IN 8.7 PWR PWR 4.7 (9.5) (Fitting for the type with P/E ports on U and/or D sides) 48.2 18 (Pitch) P = 16 (20.5) [External pilot] 18 31.8 4.7 (20) 50.5 39.7 15 3/5 E 3/5 E B 2 B 2 B 2 B 2 B 2 PE B A 3/5 14 A B A 14 A P 1 A 4 P 1 A 4 A 4 A 4 A 4 1 X E Cut dimensions for panel mounting Refer to panel cut dimensions for details. (59.8) P (31.7) 12 B 12 One-touch fitting [1(P),