Fieldbus system (CC-Link compliant) Valve series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on
Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.
Note 3) Cooling capacity decreasing due to bigger pump motor. 6.5 Option V [Stainless steel enclosure] 6.5.1 Option V [Stainless steel enclosure] With option V , the materials of enclosures are changed to stainless steel. Enclosures: Front panel, Right side panel, Left side panel, Rear panel, upper panel and bottom base.
-01 AS3001F-06 AN101-01 24 Series SYJ5000 How to Order Light/Surge voltage suppressor Electrical entry for G, H, L, M, W Electrical entry for D Type of actuation Nil S Z Without light/surge voltage suppressor With surge voltage suppressor (Non-polar type) Nil S Z R U Without light/surge voltage suppressor With surge voltage suppresor With light/surge voltage suppressor With surge voltage
Valve series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on
switch Reed switch Relay, PLC 12 V Grommet 24 V Yes 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit IC circuit 3-wire A96 A96V (NPN equivalent) 5 V 12 V Yes 24 V Grommet Relay, PLC A93 A90 A93V A90V 100 V 2-wire No 100 V or less Solid state auto switches marked with are produced upon receipt of order.
Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire
DIN type 5 pins Number Description Function Description Function 2 SW+ Number 1 Sensor power supply + Open 2 3 4 For solenoid valve +24 V 1 SV24V 2 N.C. 1 VQC 3 For solenoid valve 0 V 2 SV0V 3 SW Sensor power supply Protective ground 3 PE 4 SIGNAL Sensor input signal 4 1 5 5 SQ
V V V Vacuum port (V) M5 (or M6) 4.2 Pitch = 21 22.5 Vacuum port (V) M5 (or M6) Vacuum port (V) M5 (or M6) 919 Series ZX Vacuum port (V) Vacuum port (V) Vacuum Pump System Manifold: Type K1 Common EXH port (EXH.)
tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 Vacuum (V) port Applicable thread size: M5 Vacuum (V) port VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 5.9 5.9 5.8 (3.7) VVQ1000-F1-LC3 VVQ1000-F1-LC4 21.4 21.4 Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 Vacuum (V) port 7.9 7.9 10 10 9.2 9.2 V port
5 V, 12 V IC circuit Grommet 12 V IC circuit Relay, PLC Yes Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V Water resistant (2-color display) 2-wire 3-wire (NPN equiv.)
Valve series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on
Type V regulator (AR) is modified to the micro mist separator regulator (AWD).
The needle will fall out if it is turned more than 4 full turns. 1 Connector (w/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (w/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Nil 6 VDC S 5 VDC R 3 VDC Applicable
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
(unit mm): When the current position is within W-AREA1 and W-AREA2, the WAREA output turns ON. When W-Area 1 < W-Area2, the Parameter ALM of alarm occurs.