Series VQ Base Mounted Metal Seal/Rubber Seal

(M5 thread) SY S kit: Serial transmission unit SYJ 818 (Single) 885 (Double, 3position) F kit: D-sub connector C8 (8) C3 (3.2) P kit: Flat cable connector Option: built-in silencer (Direct exhaust) C4 (4) VQ110 VQ111 VV5Q12VQ1000 Side T kit: Terminal block 1 to 16 stations SX C6 (6) C kit: Individual connector M5 (M5 therad) S kit: Serial transmission unit VK Note 1) One-touch fittings in

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

AC Servo Motor Driver (CC-Link Type ）

CR-50500 Okaya Electric Industries) Dimensions [Unit: mm] Rated C R voltage [ 30%] Test voltage [F 20%] Band (clear) AWG 18 Twisted wire (18.5 + 2) 1 AC [V] 15 1 Soldered Between terminals: 3.6 250 0.5 50 625 V AC, 50/60 Hz 60 s CR-50500 6 1 6 1 (1/2 W) Between terminal and case: 300 min. 300 min. 48 1.5 16 1 2000 V AC, 50/60 Hz 60 s (18.5 + 5) max.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

12 V Reed switch Solid state switch 12 V IC circuit 5 V,12 V Yes Grommet Diagnostic indication (2-color indication) Relay, PLC 24 V 12 V IC circuit 5 V,12 V Water resistant (2-color indication) 12 V 3-wire (NPN equiv.)

Series SV

H J1 J2 K Q R1 R2 U V NKE Corporation: Uni-wire H System SUNX Corporation: S-LINK System (16 outputs) SUNX Corporation: S-LINK System (8 outputs) Fuji Electric Co., Ltd.: T Link Mini System Note 2) Specified layout: Indicate wiring specifications on a manifold specification sheet. (Note that double and 3 position valves cannot be used where single solenoid wiring has been specified.)

Compact Vacuum Ejector Series ZQ

D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

REA/REB

Speed 600 mm/s (mm) Model A HP MM HT J LW LL L M HG HC HB HA H EB EA REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 Model N TW S ZZ Z XB W PP PB PA P NT NL REAH15 REAH20 REAH25 65 161 17.5 194 88.5 21 62 50

0.4

The power supply for the unit should be 0 V as the standard for both power supply for output as well as power supply for control/input. VQZ SQ VFS +24 V +24 V Power supply for output Power supply for output VFR 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V VQ7 4. Do not install a unit in a place where it can be used as a foothold.

VCL

v v Class 3 v v v v Class 2 v v v v Orifice dia.

Fieldbus System

S Positive common Z V NS Negative common NZ V t Back pressure check valve (Built-in valve type) V Nil None H Built-in * Select a valve from R, U, S or Z when the SI Unit polarity is positive common.

MXW

F9PV 3-wire (PNP) F9B F9BV Relay, PLC 2-wire 12 V 24 V Yes Grommet F9NW F9NWV 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Solid state switches marked with are produced upon receipt of order.

Compact Type

30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20

ZQ

R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

21

(NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay, PLC Yes Yes No No No Yes Yes Yes 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Grommet 12 V 2-wire Water resistant (2-color indication) 4-wire (NPN) With diagnostic output (2-color indication) IC circuit 5 V, 12 V 3-wire (NPN equivalent) A96 IC circuit 5 V A93 A90 B54 B64 C73C C80C A33A

5 Port Solenoid Valve, Series VQC

F Kit P Kit T Kit S Kit 1 to 12 (24) Special wiring specifications Note 3) (except for double wiring) With name plate External pilot Note 4) K N R S Cylinder port size 2 C3 C4 C6 M5 CM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread 1 to 12 (24) Direct exhaust with built-in silencer Note 5) When specifying two or more options, list symbols in alphabetical

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

LEC-OM02704CN

9.6 9.6.1 (1) (2) (3) () 9 11 9 9.6.2 CDP(PB26)CDS(PB27) PG2VG2VICGD2 CDP PB26 CDP CDS PB27 GD2 PB06 GD2 GD2B PB29 PG2 PB08 2 PG2B P G PB30 VG2 PB09 2 VG2B V G PB31 VIC PB10 VIC VICB PB32 VRF1 PB19 VRF1 V RF 1 B PB33 V RF2 PB20 V RF2 V RF2B PB34 9 12 9 9.6.3 PA08()3 PB06 GD2 PB07 PG1 rad/s PB08 PG2 rad/s PB09 VG2 rad/s PB10 VIC ms PB29 GD2B PB30 PG2B rad/s PB31

Membrane Air Dryer

(64) O S O S (Maintenance space 100 mm or more) Port size: Rc1/8, 1/4 (NPT, G threads are not available.) 53 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: 8 Drain Drain M5 x 0.8 M5 x 0.8 23 Membrane Air Dryer/Unit Type Series IDG

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

Electric Actuators

T4 = 0.2 [s] Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 40 0.5 200 (0.067 + 0.067) 200 T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.