SMC Corporation of America
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S C hwPmfile tlDD|niD Acilaton wiflr$uiiles $enies t)(P Specif ications Brake specifications 9troke (mm) 50, 75, '100, 125,150,175,200 Motor 2-phase stepping motor s-phase steppang motor Screw (mm) 08, Lead 6 08, Lead 12 @8.

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

Switches P: Operating pressure (MPa) V: Speed (mm/s) Stroke (mm) Mode of operation (horizontal, inclined, vertical) Mode of operation Note 1) Vertical operation Inclined operation Horizontal operation Review of load weight and operating pressure W Lo Guide First tentative bore size determination F1 D 1.6 x P First tentative bore size determination F2 D 1.6 x P First tentative bore size

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

A or less 24 VDCj 10pA or less 1.5 V or less (10mA: 0.8 V of less) 24 VOCj 1opA or less R e d : O N 1 mS or less solid state switch 3 Wirc lC circuit 28 VDC l5OmA 0.8 V or less 2 V or less (10mA: 0.8 V or less) 24 VDC: 10pA or less 24 VDC] 10llA or less ON: red light emilUng diode ON: red lighl milling diode 1 mS or less ftlo$I{ildl Smies CIA Reed Type Internal Circuit D-A59W.

P . 27 P . 28 KQ2L KQ2U Use to branch line in the same direction. How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

1.0 W (SMC ) HOLD / CLEAR / ON 1 IP67() -1050 -2060 3585%RH( AC500 V1 FE DC500 V10 M FE 1057 Hz0.75 mm p-p 2 57150 Hz49 m/s XYZ 2 ( 2 XYZ 3 () 147 m/s CE UL(CSA)RoHS 300 g 1 -25No.EX-OMS0026CN -26No.EX-OMS0026CN EX600-ED D DIN 2 DIN (SY ) 2 M12(5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -27No.EX-OMS0026CN (1)EX600-ED21 24 V()

OUT1(NPN) DC12 24 V OUT2(NPN) DC(-) -43 43 43 43 NPN 1 + PNP 1 Max.30 V(NPN)80 mA 1 V NPN PNP DC(+) OUT1(NPN) DC12 24 V OUT2(PNP) DC(-) DC(+) OUT1(PNP) -65 65 65 65 PNP 1 Max.80 mA DC12 24 V N.C.

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Enclosure IP67*1 Pitch width [mm] Different pressures Reverse pressure Negative common Positive common 6.5 9 V G G V V v p. 132 v p. 132 v p. 132 v p. 133 v p. 133 v p. 133 v Individual SUP V External pilot External pilot 11.5 V 16 V *1 Refer to Manifold Specifications on pages 17 and 18 for details on IP67.

VV307-01-3--F P = 26 (Applicable cable O.D.)

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

E30 s : V g 20 Danger ~ Zone V 10 V 5000 10 15000 20 Welding Current (A) t2 SO 40 Safe 130 . ~ 20 S Zone . , .. ., , is 10 , , " 0 5000 10 15000 20 Welding Current (A) Series CD02BP High Magnetic Reid Resislance Through Hole Mount:COQ2BPO D DM-OO p 050 Hs z w o 4-" N Throu h hole 4X2-00 Counter bore Both Ends Tapped: COQ2APO -O OM-OO ~~ NOle: Female thread and rod dimensions

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

: 1/4 inch NPT) -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa Material Code S, SH V V 0 No code MPA Ports B V3 1 2 10 -30 in.Hg to 30 psig 2P 4PL Please refer to the following porting configurations. 2) Pressure gauge unit MPa or psig/bar selectable.

speed cylinder (10 to 50 mm/s) v v v XB13 Low speed cylinder (5 to 50 mm/s) v v v XC4 With heavy duty scraper 32 to 63 v v v XC6 Made of stainless steel 20 to 100 Note 6) v v XC8 Adjustable stroke cylinder/Adjustable extension type XC9 Adjustable stroke cylinder/Adjustable retraction type v v XC10 Dual stroke cylinder/Double rod type v 20 to 63 XC11 Dual stroke cylinder/Single rod

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5