155

Table (1) Electrical entry/Light/Surge Voltage Suppressor Electrical entry With surge voltage suppressor S Without light/surge voltage suppressor Nil With light/surge voltage supressor Z Voltage T D W DO T D W DO V V AC V Note) V V V DC V Note) If a AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector. 378 Coolant

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

% :*": 1 % ( +, MM # ML DA T R U H V PW DB GA L C Q K J E B TA TB S G A # $%&' ( (#) )# ! **# +,-. / 01 2 ! ( 3 MVGQM, MVGQL Common Dimensions 4556 B C DA G GA "%*<" (" !% :*": 9: ( ( 4556 *! * ( 4556 (%; H J K L MM ML NN PW Q R S T V W X YY YL Z TA TB U 25 7 -7 7 7 7 7 % ( +, 32 6 = %( ((%<" 5*!'$*' # %! 5 %* ( ( # #*! # (*! * ( ( <> 5 *!( $ %!(*""%!& * (* 6 ?

Series IDG

Note 1) Symbol P is for M type only. This is not applicable to the V type since it is equipped with a relief type regulator, 100 Note 2) This is not applicable in case of thread type symbols N and F, because barrel nipples are used for equipment connections.

AS

-23(S)A 3.2 7.2 9 (9) AS22;1F-01-04(S)A 4 8.2 19.1 26.1 (26) 13.3 13 AS22;1F-01-06(S)A 19.1 6 1/8 10.4 11.6 30.6 29.2 27.5 26.1 10 (9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5 (32.8) 36.6

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

90

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Symbol Type Pressure range [kPa] Specifications P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T 100 to 100 Analog output 1 to 5 V Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

VZ100/300/500

of P port and exhaust air from both sides of R port. 40R-2 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 2 01 X port R port Stations P/R port Thread type P port A port side 2 stations 02 P port Nil Rc G NPT NPTF M5 01 M5 x 0.8 1/8 A port F N T 20 stations 20 R port Note) For more than 9 stations, supply air to both sides

High performance type Step Motor Controller (Servo/24 VDC)

Power supply plug P.24for wiring.

2-Color Display

P Rated pressure range: 0.100 to 1.000 MPa 1 MPa 0 0.1 MPa (100 kPa) 2 added outputs P NPN or PNP open collector 2 outputs P NPN or PNP open collector 1 output + Analog output (1 to 5 V or 4 to 20 mA) CAT.ES100-70B Series ZSE30A(F)/ISE30A Mounting Replaceable One-touch fittings Bracket configuration allows mounting in four orientations. The clip type allows easy removal of fittings.

ZQ-OM01301

ZQ-OM01301-A Revision history A P.22 Change of the spare part numbers for the solenoid valve P.24 Change of the spare part numbers for the V port fitting P.25 Change of the spare part numbers for the Washer assembly P.27 P.28 Added items to 8.

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Request message (Master to Slave) STX Slave Address Request Command ETX BCC [STX] XX XX [R] [P] [V] [1] [ETX] XX Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC [STX] XX XX [ACK] [P] [V] [1] XX XX XX XX XX [ETX] XX Communication example Slave AddressNo 1 BCC selection Your system This product (Request) [STX] 01RPV1 [ETX] [65h] Data

HRX-OM-Q033

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-S010

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Flow Control Equipment

ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

Digital Pressure Switch

V: 600 Min. load impedance 50 -S/-R (Auto-shift input mode) With auto-shift switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -X (Copy function switch output) -S/-R (Copy input mode) NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -20No.PS-OMU0003-D -V/-T (Analog output mode) Switch output PNP open collector

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

Modular Type Regulator Series AR

IN OUT T IN OUT V G Plate thickness AR10 to AR30: Max. 3.5 AR40: Max. 5 Pressure gauge (option) L B Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting

VXA21/22

Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration. Options V Standard For vacuum, non-leak Select an option symbol with the "Applicable Fluid Check List" p.4.0-12 for a special fluid outside of standard.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Moment (Nm) Moment (Nm) Load weight (kg) M1 = F1 x L1 Piston speed V (mm/s) M2 = F2 x L2 ML1C/M2, M3 Moment (Nm) M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A. Consider (1) max. load weight, (2) static moment, (3) dynamic moment (when stopper collides) when calculating the max. allowable moment and load weight.