PF2A/PF2W

PF2A751/551 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

High Power Cylinder:

27 30 5.8 to 8.8 6.8 to 11.3 Axial foot GA Rc(PT)P H GB F Rc(PT)P K F Effective Thread H2 A WH NN I MM H1 NE D LY ND NB 4-LD LH LT NF E 10 E JD N 10 JC N NA X Y X Y S+Stroke LX LZ LS+Stroke ZZ+Stroke (mm) Bore (mm) 20 25 32 40 Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 I 26 31 38 47 F 16 16 19 21 A 18 22 22 24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

Guide Table Series MGF ø40, ø63, ø100 1

(4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) MGF63 Load weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200

125

Groove Cover For 200 VAC: SY100 30 2A Pin Cover For other voltages of AC: SY100 30 3A Groove DC polarity display Lever Pin Without lead wire: SY100 30 A Lead wire length (with connector and 2 of sockets only) Nil 300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm -+ Socket Lead wire How to Order Enter the part number for a plug connector solenoid valve without

REC

(assuming approximately 30% dispersion.)

Table of Contents

46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

1.63

MGPWM20-30 is selected. (6) 26 to 100 stroke, V = 200 mm/s or less (17) L = 50 mm, V = 200 mm/s or less 100 10 25 20 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 32, 40 32, 40 1 10 25 25 20 20 10 100 10 100 50 51 200 1 0.1 Eccentric distance L (mm) Stroke (mm) When the maximum speed exceeds 200 mm/s, the allowable load mass is determined by multiplying the value shown in the graph at

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

Shock Absorbers and Rate Controls

0.3-3.5 1,360 211,000 34.500 76 155 6,660 lXOEtl2,oilrz 30 50.0 0.08.0.8 1,360 27 |,000 34.500 76 155 1t .7 60 3.4 0Eilt2.0l{lx4 30 100.0 0.3-3.5 2,1t0 362,000 34,500 69 160 6,660 4.0 0Elll2.OXlx6 30 150.0 0.3-3.5 4,070 421,000 34,500 90 285 6,660 5.0 0tlll3.0l{lx2 40 50.0 0.3,4.3 2,300 t2,000 6i,000 0 200 t2,000 t.0 0ttl3,Ofix3.J 40 90.0 0.3"4.3 4,000 652,000 67,000 0 200 12,000 9.1 0Ill3.0ilx5

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

51

64 74 16 20 22 30 36 46 28 28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

SL5200

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S