Stations: 3 Stations, A, B Port: 04S (Side/Bottom, Bottom Plugged 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 3 Stations, A, B Port: 04S (Side/Bottom, Bottom Plugged 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: U Side, Thread: T (NPTF)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 12F (Ø12)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 12F (Ø12), Knob Color: R (Red)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 10F (Ø10), A Side Port Size: 04S (PT 1/2)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 12F (Ø12), A Side Port Size: 04S (PT 1/2)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 12F (Ø12), A Side Port Size: 04S (PT 1/2), Knob Color: R (Red)

ZFC Series

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

IN ZFC100-04 Cover B Element Cover A 1 ZFC100-06 ZFC200-06 Replacement Parts ZFC200-08 0.1 1 10 100 Description Part no.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Metric size Inch size Meter-out Meter-in 0 1 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Table of Contents

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

High Purity Fluoropolymer

Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Connection threads Symbol 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Connection threads A B C D E F A B C D A B C D A B C D Applicable tubing size (inch) No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 Class Class 1 2 3 4 1 2 3 4 5 6 1 2

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

Fieldbus System

R) EXH port] (Double sided type: C12) Input connector Digital Output Unit C10: 10 One-touch fitting (C12: 12 One-touch fitting) Output connector Digital Input Unit 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 11.5 R R 8 76.5 12 3 3 X 56.6 (12) 49.5 B B B B B B B B P X P12 30 25 1 1 A A A A A A A A 10

CL

Cylinder Double Acting, Single Rod With Mounting Bracket Foot style: CLG1LN Foot Style Without rod boot With rod boot ZZ Bore size (mm) BZ M W X Y LS LT LX LH LD LZ LC ZZ 202 219.5 222.5 246 182 197.5 200.5 226 117 127 128 142 3 3 3 3 50 57 60 68 62 70 74 84 25 28 28 33 6 6 6.6 6.6 4 4 4 4 63.5 74.5 74.5 83 3 3.5 3.5 4 10 10 10 10 15 15 16 16.5 7 7 8 8.5 20 25 32 40 For long stroke, refer

MB

4 100 + 100 (n2) n = 2, 3, 4 D-A3 D-G39 D-K39 n (Different sides) n (Same side) CJ1 1 10 2 (Different sides) 2 (Same side) 35 55 CJP 35 + 30 (n2) n = 2, 3, 4 55 + 50 (n2) n = 2, 3, 4 n (Different sides) CJ2 D-A44 n (Same side) CM2 1 2 (Different sides or Same side) 1 10 CG1 15 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

CL

Cylinder Double Acting, Single Rod With Mounting Bracket Foot style: CLG1LN Foot Style Without rod boot With rod boot ZZ Bore size (mm) BZ M W X Y LS LT LX LH LD LZ LC ZZ 202 219.5 222.5 246 182 197.5 200.5 226 62 70 74 84 3 3 3 3 50 57 60 68 117 127 128 142 25 28 28 33 63.5 74.5 74.5 83 3 3.5 3.5 4 10 10 10 10 15 15 16 16.5 7 7 8 8.5 6 6 6.6 6.6 4 4 4 4 20 25 32 40 For long stroke, refer

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32