XL Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Bellows seal C Double acting Bellows seal F Single acting (N.C.)
or less 13 or less VQZ1220 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal Double 10 or less 13 or less 13 or less VQZ1221 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 20 or less 26 or less 40 or less VQZ1320 0.08 0.25 0.50 0.13 0.29 0.55 Metal seal Closed center VQZ1000 25 or less 33 or less 47 or less VQZ1321 0.18 0.39 0.68 61 0.23 0.38 0.87 Rubber seal 20 or less 26 or less 40 or less 3 position
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.
S41 Type/Side Ported [ ] for AC VS SS3YJ3-S41Station -M3 L plug connector (L) M plug connector (M) 48.6(GZ, GS: 49.3) [50.3] 41.5 [48] P R P R 11 22 28 29.1 2-3.5 (Lead wire length) (Mounting holes) 300 52.6 [59.1] 300 (Lead wire length) 41.5 [48] L2 4-M5 X 0.8 L1 48.9 [50.2] (P, R port) 58.5 44.9 41.5 [48] 13 4.5 13 4.5 29.1 22.5 A A 13 10 5 5 4-M5 X 0.8 P=10.5 13.5 (P, R port) n-M3 X 0.5
Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.
Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.
01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (
When the zero cut-off function is set to 0, the flow rate display value starts from 0 L/min., but in conditions other than horizontal installation and supply pressure of 0.35 MPa, the output may not be 0 L/min. 13 E F G PF2M701/02/05 /10/50/11/21(-L) PF2M725(-L) Voltage output (0 to 10 V)*1 0 V 0.10 V 0.12 V 10 V Output Output C G D H B F A E 0 0 Min. value of Flow Zero cut-off Max. value
G1, Symbol N: NPT1) Tank port size Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Supply side pressure range MPa 0.2 to 0.5 Automatic water fill function (Standard) Supply side water temp. range oC 5 to 35 Automatic water fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact part material Metal Stainless steel, Copper (Brazing
F 0 1 F0 1 Sub Function 71 () F8 2 F0 2 F0 Address 3 F0 3 F0 Address(0) 4 F0 4 F0 DATA(H) 5 F0 5 F0 DATA(L) 6 F0 6 F0 7 70 1 7 F0 F8 2 8 70 3 8 F0 F8 4 9 F0 Sub Function 9 F0 10 F0 Address 10 F0 11 F0 Address(0) 11 F0 1 12 F0 DATA(H) 12 F0 13 F0 DATA(L) 13 F0 2 14 F0 14 F0 15 F0 15 F0 96 - 23. 1 1 2 1 1 RWrn+7 12 (4) 12 10 (0255)RWrn+7 PLC 10 1 1 100mm/s RWwn+2
Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.
88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500 21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F
G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity HEA IDH Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat
N) Allowable lateral load (Ordinary load) Bore size (mm) Stroke (mm) Model 250 10 20 300 25 30 350 40 50 400 75 100 125 150 175 200 11 24 19 17 14 13 26 22 19 17 15 13 12 MGPM F 8 37 27 22 35 30 23 18 15 12 11 10 MGPL 16 38 31 27 23 21 37 32 27 24 22 20 MGPM 16 12 54 40 32 54 47 35 28 23 20 17 15 MGPL CL 42 49 36 32 43 38 29 35 87 75 66 59 54 49 MGPM 20 35 58 30 26 48 101 23 90 70 58 62 54
Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150
VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.