LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

Fieldbus System

P-tight screw (4 x 14) 2 pcs. w Valve Plate EX600-ZMV1 EX600-ZMV2 (Specialized for SY series) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs.

HRX-OM-M005

Alarm Display screen (Alarm message) Figure 6-1 Error Occurrence HRZD Series 6.1 Error Message 6-1 HRX-OM-M005 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

KC

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

CNG

7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

S070

W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Body ported S070C-G-32 Grommet type R1.1 2 7 7.2 V100 R1.1 Mounting screw (AXT632-106A-2) M2 x 0.4, thread depth 6 mm or more SY SYJ 150 (Lead wire AWG#26) 5 21 5.5 2 (OUT) port VK 5.5 4 4 11.5 9.5 VZ VT 1 (SUP) port 3 (EXH) port

S070

3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (

Dual Speed Controller with One-touch Fitting Series ASD 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Miniature Regulator Series ARJ210

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series Ports 2, 4 Symbol 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 8 One-touch

Speed Controller with One-touch Fittings Series AS In-line Type 1

AS2001F-03 AS2001F-06 13 28.7 33.7 6.3 44.8 11.6 6 13.5 11.8 18 28.6 33.6 6.2 50 11.4 16.5 3/16" AS2001F-05 AS2051F-06 26 30.2 35.2 6.7 53.2 12.8 6 17 14.8 21 29.5 34.5 7.1 52.2 13.2 17 1/4" AS2001F-07 AS2051F-08 31 31.5 36.5 8.1 59.8 15.2 8 18 24 29.6 34.6 6.2 52.2 11.4 16.5 3/16" AS2051F-05 AS3001F-06 18 33.3 38.3 7.4 59 12.8 6 17 14.8 26 30.5 35.5 7.1 54.4 13.2 17 1/4" AS2051F-07 AS3001F

Metering Valve with Silencer Series ASN2

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

Ionizer Gun

Route the Ionizer wires separately. 6) Flush the piping before connecting.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Auto Switch Guide

16-28 Grommet 6-16-29 Connector 6-16-30 Band 6-16-31 Terminal conduit 6-16-32 6-16-33 Grommet 6-16-34 Rail 6-16-35 Connector 6-16-36 Grommet Tie-rod 6-16-37 Terminal conduit 6-16-38 6-16-39 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Safety Speed Control Valve (SSC Valve) Series ASS

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

Micro Mist Separator Series AFD20/30/40

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.