Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

XL

Port S (10) remains pressurized and valve S (18) remains open.

Short Stroke Electric Actuator Series LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

CNS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140 125 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

Series AK1000

200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure

Rotary Table/

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

air-filter-e

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

Air Preparation Equipment

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

2/3 Port Valve

1) _ S L, Z _ S L, Z T Manifold base Mark Applicable valve VX21l1-00 VVX21 VVX22 VVX23 Port size VX22l1-00 VX23l1-00 1 2 Rc(PT) Rc(PT) 1 8 1 4 AC All common ports are 3/8.

17

0.1 0.06 1 0.1 0.02 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 1187 Mechanically Jointed Rodless Cylinder Basic Type 25, 32, 40 MY1B Series RoHS How to Order M9BW 25 Z 300 MY1B Basic type Made to Order Refer to page 1189 for details

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Maximum acceleration: 2000mm/s Positioning time (sec.) Positioning distance (mm) 1000 500 100 10 1 10 100.4 50.4 10.4 1.4 0.5 100 10.4 5.4 1.4 0.5 0.4 Speed (mm/s) 150 7.1 3.8 1.1 0.5 0.4 300 3.8 2.2 0.8 0.5 0.4 Values will vary slightly depending on the operating conditions.

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

TABLE OF CONTENTS

Body Brass Body S. S.

VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components VS4 System Solenoid valve Speed controller Silencer Tube bore x Length VQ7 Series VFS2000 AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) A T0604 x 1 m 1 8 Rc EVS Series VFS2000 AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) VFN B T1075 x 1 m 1 4 Rc Double Check Spacer/Specifications Can hold an intermediate cylinder