SL5200 Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02
and up: Stroke length tolerance Standard Stroke Table Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Symbol 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350
Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.
Rod side flange style Foot style Basic style S + Stroke With air cushion LS + Stroke S + Stroke ZZ + Stroke ZZ + Stroke ZZ + Stroke S + Stroke Without rod boot With rod boot Without rod boot With rod boot S Without rod boot With rod boot S Bore size (mm) Stroke range WB S Bore size (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 LS Bore size (mm) Stroke range 201 to 350 301
Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)
6 Single acting, spring return Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Gasket Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.
P Ground ball screw Rolled ball screw Sliding screw S N Table 1: Feed Screw and Stroke Combination Correspondence Table Stroke (mm) Model 500 600 700 800 900 1000 1200 100 200 300 400 LG1H212PAStroke Screw combination LG1H212NAStroke LG1H212PCStroke LG1H212NCStroke LG1H212SCStroke Please note that combinations other than those shown above cannot be produced.
Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 Cable color Connector D terminal no.
The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.
Without auto switch CG5 L N 25 S R 100 CDG5 L N 25 S 100 G5BAL R With auto switch Built-in magnet Number of auto switches 2 pcs. 1 pc. n pcs.
J Plug D-X Series Variations 20Bore size (mm) Seal material Applicable auto switch 10 16 20 25 32 Series Data 40 50 63 80 100 Water resistant D-H7BAL CJ5-S NBR FKM Water resistant D-G5BAL CG5-S 10-14-1 2 Series CJ5-S/CG5-S Stainless Steel Cylinder Specific Product Precautions Be sure to read before handling. Caution on Design Operating Environment Warning Warning 1.
Attachment Port size for intermediate air release Applicable models Attachment mounting position Description Symbol None Nil AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve Thread type AW + [K] + AL AC20A to 40A Metric system thread (M5) Rc NPT G AF + AR + [S] + AL AC20 to 60 Nil AW + [S] + AL AC20A to 40A N Note 1) S Pressure switch AF + [S] + AR AC20B
ES20-150 B Stainless Steel Cylinder Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 For use in environments with water spray such as food processing machines Stainless Steel Cylinder Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 Uses grease for food processing machines that meets FDA (U.S.
Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D
Applicable model Attachment mounting position Description Symbol Nil None VY1 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve G AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size PPA AW + [S] + AL AC20A to 40A Pressure switch Body size Port size S AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AL AF + AFM + [S] + AR AC20C to
When ordering the double clevis, the clevis pin and the cotter pin (2 pcs.) are attached. 6-9-2 3 Series CS1 Air Cylinder: Standard Type Dobule Acting, Single Rod Specifications Air-hydro Type Lube, Non-lube Fluid Turbine oil Air 1.57 MPa Note) Proof pressure 0.97 MPa Maximum operating pressure Minimum operating pressure 0.06 MPa 0.05 MPa Piston speed 0.5 to 200 mm/s 50 to 500 mm/s Cushion
(Example) Mass of transferred object: 300 kg, Transfer speed: 20 m/min Friction coefficient: = 0.1 Mass of transferred object m [kg] Friction coefficient RS2H50-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.1 = 0.2 500 500 Mass of transferred object m [kg] Mass of transferred object m [kg] 50 Operating range Upper limit 400 400 Upper limit 50 Operating range
Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ3143-M5 Cylinder is in extending.
S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.
"S" option is not available.