SMC Pneumatic Clean Series

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

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D0 D1 D2 U0 U1 U2 1 to 16 stations Kit L Kit L SD S Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 output points) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 output points) DeviceNet OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) CC-Link Note 1) For the T kit and S kit, 2 stations are required to mount the terminal block

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

CE

Mounting style B L F 12 mm equivalent S 1 pc.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

MGP

MGPMGP-A MGPS1.5MPa 1.0MPa 12,16 0.12MPa 16 0.15MPa 20100 0.1MPa 0.1MPa 0.2MPa 20100 -1060 ( 1263 50500mm/s 1663 50500mm/s 50400mm/s 80,100 50400mm/s 50400mm/s 80,100 +1.5 0 1 4. 4-1. (mm) 12,16 20,25 32100 mm) 10,20,30,40,50,75,100,125,150,175,200,250 20,30,40,50,75,100,125,150,175,200,250,300,350,400 25,50,75,100,125,150,175,200,250,300,350,400 MGP M L A 4-2.

Title not found

to the control panel,s protective earth (PE).

Single Axis Electric Actuator Serriies LJ1S Slider Guide

1 1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Limit switch Series 10 Series 20 Series 30 10 20 30 Cable entry direction Nil None B contact specification 2 pcs.

MGC

MGCM Slide bearing Data 350, 400, 450, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

) rubber hose 12 10 Cylinder bore size 40 9 Flow rate (l/min) 5 8 Cylinder bore size 32 7 6 Cylinder bore size 25 4 (steel pipe I.D.) 5(approx. 4.5) 4 Cylinder bore size 20 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 2.8 General range of rubber hose (max. 5m/s) General range of steel pipe (max. 4.5m/s) Flow velocity inside pipe (m/s) Piston speed (mm/s) How to read the chart: Example) The

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Sine Rodless Cylinder Series REA

and up: Stroke length tolerance Standard Stroke Table Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Symbol 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350

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Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

CL

Rod side flange style Foot style Basic style S + Stroke With air cushion LS + Stroke S + Stroke ZZ + Stroke ZZ + Stroke ZZ + Stroke S + Stroke Without rod boot With rod boot Without rod boot With rod boot S Without rod boot With rod boot S Bore size (mm) Stroke range WB S Bore size (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 LS Bore size (mm) Stroke range 201 to 350 301

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)