Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.8 3.5 24 30 M3 x 0.5 21 3 29 36 48 18.5 CDRBU2W20-D 42 34.5 30 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 25 25.5 34.5 CDRBU2W30-D 50 47.5 31 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 25 11-3-13 48 Series CRBU2 Dimensions: 40 (With auto switch unit) Single vane type/Double vane type CDRBU2W40-S/D (mm) h Keyway dimensions l b h (h9) l b (h9) Model 52 64

Table of Contents

34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22 50 47.5 31 M5 x 0.8 5.5 M5 x 0.8 25 11-3-13 48 Series CRBU2 Dimensions: 40 (With auto switch unit) Single vane type/Double vane type CDRBU2W40-S/D (mm) h Keyway dimensions l b h (h9) l b (h9) Model 52 64

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22 50 47.5 31 M5 x 0.8 5.5 M5 x 0.8 25 11-3-13 48 Series CRBU2 Dimensions: 40 (With auto switch unit) Single vane type/Double vane type CDRBU2W40-S/D (mm) h Keyway dimensions l b h (h9) l b (h9) Model 52 64

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications

C76

Rod Boot (mm) Item h 1 to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com X (Hexagon socket head cap screw) F (Through-hole) CX V (Opposite side: Same) (L) (Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64

CXWM/CXWL

2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 4-5.5 through 4-9.5 counterbore depth 5.5 2-RB1006-X552 (Shock absorber) (mm) ZZ 184 234 284 334 384 434 484 Z 156 206 256 306 356 406 456 S SS 104 129 154 179 204 229 254 Q 170 220 270 320 370 420 470 F L P 35 60 75 90 90 90 90 Model CXWM20-50 CXWM20-75 CXWM20-100 CXWM20-125 CXWM20-150 CXWM20-175 CXWM20-200 52 77 102 127 152 177 202 64

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

20.0 90 58.0 8.6 160 12.0 12.0 54 18.0 M6 x 1 2 12 38 138 14.0 M6 x 1 27.0 134 68.0 11.0 220 22.0 16.5 84 20.5 M8 x 1.25 3 16 60 178 17.0 M8 x 1.25 31.0 NE NG NH NW PA PB PC PD PF Q QW T TT UU YW Z P PE PG Model MY3B16 MY3B25 MY3B40 MY3B63 M5 0.8 4.0 122 42 30 6.5 7 19 114 4.0 32.5 26 44 43 17.2 8 22.5 9.7 8.5 Rc,NPT,G1/8 Rc,NPT,G1/4 Rc,NPT,G3/8 6.0 178 62 47 9.0 10 30 166 6.0 47.5 40 64

Thermo-chiller/Rack Mount Type

61/64 Accessories18 Power supply connector, Particle filter element and maintenance handle19, Operation manual Weight10 [kg] 40 46 1 No condensation should be present.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

] (Station n) (Station 1) (Light/surge voltage suppressor) + + + + 41.6 25 L plug connector (L) M plug connector (M) DIN terminal (D, Y) M8 connector (WO) 53.5 53.5 53.5 53.5 3.4 3.4 3.4 3.4 70.7 [72.9] 80.5 [82.7] 65.7 69.3 76.7 89.6 Pg7 68.1 [75.1] Approx. 300 (Lead wire length) 44 61.5 M8 x 1 71.7 Approx. 300 (Lead wire length) 41.6 Max. 10 83 57 [64] 90.5 Applicable cable O.D. 3.5 to

EXxx-OMY0006CN

P LED Table 10-28 P LED LED Acknowledgement 64 No.EX##-OMY0006CN 10.10. MAC FW/HW Firmware version (FW): 2.1.X Hardware version (HW): 03 and higher Fig. 10-6 10.11. DIP 10.11.1.

LECA6_C

I/O ()1 I/O (8 ) 64 / I/O 12 6 - 2.2.

JXCx-OMU0004

11.4 [820m] . 64 12. . 65 12.1 . 65 12.2 . 66 13. / . 69 14. / . 70 14.1. . 70 14.2 . 71 14.3. . 71 14.4. . 73 14.5 . 74 14.6. . 74 15. . 75 15.1. / . 75 15.2 . 75 15.3 . 76 15.4 . 77 15.5 . 77 15.6 . 77 15.7 . 78 16. . 79 16.1 . 79 16.2 . 81 3 No.JXC-OMU0004-A LECP1 Series/ 1.

SYJ300/500/700

] 41.6 VG 25 VP 1/8 (A port) S070 VQ 23 8 19.5 VKF (Pitch) P=19 VQZ 20 VZ DIN terminal (D) M8 connector (WO) L plug connector (L) M plug connector (M) VS VFN 53.5 53.5 53.5 53.5 3.4 87.1 3.4 3.4 3.4 70.7 [72.9] 80.5 [82.7] 65.7 72.2 79.6 89.6 Max. 10 Pg7 Approx. 300 (Lead wire length) 68.1 [75.1] 44 M8 x 1 61.5 71.7 Approx. 300 (Lead wire length) 41.6 83 57 [64] 90.5 Applicable cable O.D.

VFR

Material Description Pilot valve assembly M8 x 80 VFS6000-15 VFR61 VFS6000-15 VFR62 M8 x 80 VFS6000-15 VFR63/64/65 NBR Hexagon socket head screw Gasket o M8 x 80 Refer to How to Order Pilot Valve Assembly on page 3-5-94. Steel !0 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P = 11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) 1 2 3 4 5 n U side D side Stations Direct manual override (Non-locking) 24 15 43 L plug connector (L) Dimensions n: Stations n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61 53 72 64

OMU0023

Card Motor Controller Operation Examples . 61 6.1 Basic Settings, I/O Configuration . 61 6.2 Step Data configuration . 61 6.3 Operation Data Acquisition . 62 6.4 Operation Instruction Method . 62 6.5 Program Examples . 63 (1) Basic settings . 63 (2) Communication check . 63 (3) Step Data configuration examples . 64 (4) Return to Origin . 64 (5) Positioning operation (Step Data Operation)