D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80
(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +
8 MB n (Same side) 2 (Different sides or Same side) 20 25 25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) D-A59W CA2 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 15 25 25 2 (Different sides or Same side) CS1 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) C76 1 10 25
2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.
n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same
n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same
VEX1-17 1 pc. 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 Note 1) 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 Piping thread type 2 Common external pilot 8 2 8 stations Nil Rc G Note 2) A B C 3 8 1 4 2 stations 1 F N Internal pilot 0 1 For VY140 4 3 8 NPTF NPT 2 Common external pilot T 6 3 8 1 2 6 stations VY manifold pilot type Body size B, 2 Note 1) In the case
OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.
rules and safety requirements for systems and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-2 i-2 . i-3 i-2-1 . i-3 i-2-2 . i-4 i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3
No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55
Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.
for systems and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3
J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .
9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.
J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .
(Different sides, Same side), 1 25 135 125 (n 2) 2 (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n (Same side) n = 4, 8, 12, 16 2 (Different sides, Same side), 1 155 35 145 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 155 + 55 35 + 55 145 + 55 n (Same side) n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 Different sides 110 35 Same side 110 100 D-A3 D-G39 D-K39 Different