Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

7ND9071en

106 6468 1 10 mm or 3/8" 70.0 100.0 QP Stroke volume dm3 / in3 NPT Piping Air (s) Spring (s) Piping Air (s) Spring (s) Piping Air (s) Spring (s) 1C 0.62 37 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] * * 10 mm or 3/8" [6 mm or 1/4" (x)] 1.2* 2.1* 2C 1.08 66 3/8 10 mm or 3/8" 2.4 3.0 3C 2.18 133 3/8 10 mm or 3/8" 4.8 5.2 4C 4.34 265 3/8 10 mm or 3/8" 3.2 3.7 5C 8.7 531 3/8 10 mm or 3/8" 7.5 11.0 6C

Step Motor Driver （ Pulse input type ）

Overflow ALM [6C] 1-108 RESET C SVON Make sure there are no obstructions that interfere with the electric actuator movement. Also, make sure that the load, speed, acceleration and deceleration are within the range of the electric actuators. input The motor speed exceeds a specific level due to an external force, etc.

AW20-B to AW60-B

Output: PNP output / Electrical entry: Wiring bottom entry E4 Output: PNP output / Electrical entry: Wiring top entry + d Set pressure Note 10) Nil 7.3 to 123 psi (0.05 to 0.85 MPa) setting 1 2.9 to 29 psi (0.02 to 0.2 MPa) setting + Nil Polycarbonate bowl 2 Metal bowl Semi-standard 6 Nylon bowl e Bowl Note 11) 8 Metal bowl with level gauge y C With bowl guard Note 12) Note 12) Note 12) 6C

G15/G27

Note 3) Temperature conditions: at 20C (5C), in other cases, 6C F.S.

Direct Solenoid

hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

Thermo-chiller

Required ventilation rate [m3/min] Heat radiation amount [kW] Differential temp. of 10.8F [6C] between inside and outside of installation HRS100-A-20 Approx. 305 155 HRS150-A-20 Approx. 440 220 Differential temp. of 5.4F [3C] between inside and outside of installation Model 27 Series HRS100/150 Specic Product Precautions 4 Be sure to read

AWM20 to AWM40

entry NPN output / Wiring top entry PNP output / Wiring bottom entry PNP output / Wiring top entry Nil E G E1 Note 5) Pressure gauge c Digital pressure switch E2 Note 5) E3 Note 5) E4 Note 5) + Nil 1 Note 6) Set pressure 0.05 to 0.85 MPa set 0.02 to 0.2 MPa set d + Polycarbonate bowl Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard Nil 2 6 8 C 6C

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators Nil 1 Note 6) Set pressure c 0.05 to 0.85 MPa setting 0.02 to 0.2 MPa setting + Polycarbonate bowl Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard + Nil 2 6 8 C 6C Bowl d Semi-standard J Drain port Note 7) Drain guide 1/8 Drain guide 1/4 + Nil N Exhaust mechanism e Relieving type Non-relieving type

This is a legacy product, and replaced byAW20-02C-6C-B, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, DA, AW MASS PRO 1/4 MODULAR (PT), 0.88184 lb

AWM20 to AWM40

Nil E G E1 Note 5) Without pressure gauge Square embedded type pressure gauge Round type pressure switch NPN output / Wiring bottom entry NPN output / Wiring top entry PNP output / Wiring bottom entry PNP output / Wiring top entry Pressure gauge c Digital pressure switch E2 Note 5) E3 Note 5) E4 Note 5) + Nil 1 Note 6) Set pressure 0.05 to 0.85 MPa set 0.02 to 0.2 MPa set d + Nil 2 6 8 C 6C

AWM20 to AWM40

Nil E G E1 Note 5) Without pressure gauge Square embedded type pressure gauge Round type pressure switch NPN output / Wiring bottom entry NPN output / Wiring top entry PNP output / Wiring bottom entry PNP output / Wiring top entry Pressure gauge c Digital pressure switch E2 Note 5) E3 Note 5) E4 Note 5) + Nil 1 Note 6) Set pressure 0.05 to 0.85 MPa set 0.02 to 0.2 MPa set d + Nil 2 6 8 C 6C

(Normally Closed)], Bowl: 6C (w/Bowl Guard, Nylon Bowl), Drain Port: w/Drain Cock, Indicator: w/o Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and Caution Plate for Bowl in Imperial Units: psi, °F)

(Normally Closed)], Bowl: 6C (w/Bowl Guard, Nylon Bowl), Drain Port: w/Drain Cock, Indicator: w/o Indicator, Flow Direction: R (Right to Left), Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and Caution Plate for Bowl in Imperial Units: psi, °F)