15

Dimensions: Motor Top Mounting LEYG25, 32 Motor flange Y2 Motor Rod operating range Note 1) (Stroke + 4 mm) 4 x NA Section XX1 4 x OA through thread depth NB H M EV S Q U GA J Y (EB) EA M C EH T EB X 0.5 XA H9 depth XA EC ED B + Stroke Y1 L + Stroke 4 x OA thread depth OB XA H9 DB X Section XX1 (2:1) Bottom hole G through Note 2) depth XA 2 x NA thread depth NC (R2) XAH9 DA P XB (0.5) K Section

42

SZ VF VQ5150 VQ5151 (A) 4 (B) 2 (A) 4 (B) 2 VP4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 4/5 VQ 4/5 q w e q w VQC 1/2 VQC 4/5 VQZ SQ (A) 4 (B) 2 VQ5251 VQ5250 (A) 4 (B) 2 VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR r e q w e r q w VQ7 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P)

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

Fieldbus System

B: Locking type (Tool required) 2-position double (Metal) 4-position dual 3-port valve (B) 2(B) 4(A) K Note 2) High pressure type (1.0 MPa, 0.95 W) N Note 3) Negative common R Note 4) External pilot 2(B) (A)4 Note) B B A (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.O. N.O. 2 Note 1) When multiple symbols are specified, indicate them alphabetically.

KQ2

1 8 1 4 3 16 3 16 5 32 1 4 3.5 16.5 3 16 1 4 5 16 4.6 17 1 4 3 8 K 3 8 6 18.5 5 16 1 2 Applicable tubing M 7 21 1 2 3 8 Note) D: Max. diameter H KK D MS Cross: KQ2TW Applicable tubing O.D.

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

MGP

P (Plug) Q J K GA GB S MGQ G FB 2-P PA+Stroke FA C+Stroke MGG E B+Stroke A+Stroke MGC *Intermediate strokes, except standard stroke, can be manufactured by using a spacer.

Metal Seal/Rubber Seal Series VQ Body Ported

housing assembly (AXT100-2-PU20) of q SI unit and w P kit (20 pins).

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

24

2 !1 o i y !6 t r q @5 e r r w @1 !9 u !0 !2 @4 63 or more 16 20 32 @0 @3@2 !5 16 to 25 25 stroke Cushion valve section 16 to 25 50 stroke or more 50 or more Component Parts Component Parts No.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

5

x 1.75 10 26 M26 x 1.5 40 1/2 126 216 202 Smooth Cylinder CA2Y Series Single Clevis: CA2YC G 2 x P G 2 x P G G Width across flats KA Width across flats KA 4 x J 4 x J 2 x Cushion valve 2 x Cushion valve CDH10 CDH10 MM MM REA E D D E B C B C REB Width across flats B1 Width across flats B1 AL H1 AL H1 CX CX REC N N F N N F U U A A K K C C B B Smooth Smooth H H ZZ + Stroke Z + Stroke S + Stroke

Compressed Air Cleaning Filter Series

66 5 2 1/4, 3/8 103 18 98 90 5 90 10 150 80 28 8 7 7 14 7 12 50 95 34 80 5 2.3 3/8, 1/2 132 57 Odor Removal Filter Series AMF Dimensions AMF450C/550C P D Q T R E D N F L U Bracket (Accessory) O J K M V W B IN OUT C I A G Maintenance space H (mm) A Model Port size Bracket related dimensions B C D E F G H I 172 N 90 J 31 K 10 U 9 V 9 L 18 M 9 W 15 O 55 P 111 Q 50 R 88 T 3.2 AMF450C AMF550C

Base Mounted Metal Seal/Rubber Seal Series VQ

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) Mitsubishi Electric Corp.: CC-LINK System 0 A B C D E F1 G H J1 J2 K Q R1 R2 V (2) Max.16 stations Kit S Max. 8 stations P. 2-4-196 Max.16 stations Number of terminals: 8, 1 row Applicable stations 1 to 8 stations 1 P. 2-4-200 kit T (2) Max. 8 stations 2 Applicable stations 5 to 16 stations

New

Cable 6 to 12 G1/2 Q F S D F Q 280 G1/2 D 45 (42) (44) 31.5 With full-wave rectifier R C E C R E J J OUT IN IN OUT 2 x M Depth 5 2 x M Depth 5 G A H A G H 2 x P Port size B1 B B B1 2 x P Port size Bracket mounting hole dimensions (mm) A B B1 C D E F G Port size P a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5

Air Cylinder

2 !3 !8 @ A !5 !6 @2 q i u e o r y !0 !1 MB MB1 CA2 CS1 CS2 @ B @ C !9 @1 t @0 Rod section Boss-cut Integrated clevis Component Parts No.

VCC

How to Order SUS316L Stainless Steel Fitting VCC1 00 2 q VVCC1 10A 2 1 q VCK 02F K 1075 q w q Type (Passage number) q Type (Passage number) q Type (Shape) w Piping port 2 3 2D For 2 port valve For 3 port valve 2 3 K L H 1209 1008 1075 0806 0604 40 swivel elbow 90 swivel elbow Male connector 2 port valve 3 port valve 2 port/Diaphragm type Piping port for 12 x 9 Piping port for 10 x 8 Piping

NCQ8

For 075, 106 K 2 sides x 4 places O-counter bore R depth M1 E 0.13 + Stroke A + Stroke C A Symbol Bore 3/8" to 2"st 1/8"st 1/4"st 1 1/4" to 2"st 1/8" to 1"st O M1 K J I H E D Q P Z M2 N W R 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 0.31 1.25 #10-32UNF 1.56 0.06 0.25 0.86 1.22 1.06 1.63 0.36 0.46 0.15 0.25 0.19 #10-32UNF 0.15 1.31 0.38 0.50 1.56 5/16-24UNF 2.03 0.16 0.44 1.19

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side