Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN Q B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Modular Type Filter Regulator Series AW

(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40), and the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30 to 40).

Smooth Cylinder/Low Speed Cylinder

Without auto switch With auto switch Stroke range (mm) Bore size (mm) C D E I H J K L M Q 11.5 A A B F 5.5 B F Q P M5 x 0.8 P 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 33 7.5 10.5 13 16 45 60 1/8 M8 x 1.25 4.5 14 7 34 10.5 1/8 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 46.5 39.5 8 11 13 16 52 69 1/8 M8 x 1.25 5 14 7 40 8 11 1/8 50 48.5 40.5 10.5 10.5 15 20

CRB2/CRBU2/CRB1

Applicable shaft type: K The long shaft can be further shortened by machining a middle-cut chamfer into it. (The position of the chamfer is same as the standard one.) (If shortening the shaft is not required, indicate "" for dimension X.) Applicable shaft types: J, K, T (mm) W1 X L1 max. L3 max. (mm) Shaft type J K T J K T J K T J K T Size Size Y W2 L2 max. L4 max.

CNA

F AL A F Q GB K With rod boot LH W W D e D E LY V H1 Across flats B1 KA width across flats 8 f l LT T h + l Y X S + Stroke BN N X Y ZZ + l + 2 stroke LX lC H 4-LD With rod boot at both ends LS + Stroke ZZ + 2 stroke ZZ + 2 l + 2 stroke lB (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 LD LH LS LT A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 9 40 45 50 65 75 207 222 250 306

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1.0 Communication speed [bps] 156 k/625 k/2.5 M /5 M/10 M 125 k/250 k/500 k 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 10 M/100 M Configuration file Note 2) EDS file GSD file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 200 bytes Output 200 bytes Input 57 words Output 57 words Input 256 bytes Output 256

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

15

Dimensions: Motor Top Mounting LEYG25, 32 Motor flange Y2 Motor Rod operating range Note 1) (Stroke + 4 mm) 4 x NA Section XX1 4 x OA through thread depth NB H M EV S Q U GA J Y (EB) EA M C EH T EB X 0.5 XA H9 depth XA EC ED B + Stroke Y1 L + Stroke 4 x OA thread depth OB XA H9 DB X Section XX1 (2:1) Bottom hole G through Note 2) depth XA 2 x NA thread depth NC (R2) XAH9 DA P XB (0.5) K Section

42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

MGP

J K (Plug) PA+stroke S G FA FB C+stroke B+stroke A+stroke E MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

CM2

Symbol Maximum ambient Rod boot material temperature One side Both sides J JJ 70C Nylon tarpaulin Symbol Specifications K KK 110C Heat resistant tarpaulin -XA Change of rod end shape Mounting Bracket Part No. Maximum ambient temperature for the rod boot itself.

5

to step q.