7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

VFS

-1 VVF2000-26-6 AXT625-6 q w e r t y u Steel plate NBR NBR NBR NBR NBR Resin Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations AXT333-12 Rubber plug NBR !

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Air Fittings & Tubing

KQ2U23 to KQU12 KQ2U16 SKQ19, #1 to #6 SKQ21, #16 Different diameter union Y: KQ2U Effective area (mm2) Tube O.D. (mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

C85

8 @1 u !3 q !5 !1 10A e !2 t !9 !7 !4 !6 !0 i 2A @2 r @0 o y !8 @1 u !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

•

G ZPR4DD 40 43 29 425 17 53.3 [71.1 1 6 8 Applicable tube (mm) 25 1 0 ZPR250 28 20 45.8 636 5 35 6 8 Applicable tutle 0 .0 .t P Q R "5 .6 6 24.3 16.8 12.8 " 8 8 26.2 18.7 ' 15.2 APpllC<>Qle tube 0 .0 .p Q R , .4 4 23.3 15.8 10.4 Applicable tube (mm) .5 6 ' 6 24.3 16.8 12.8 ,8 8 26.2 18.7 1 5.2 21 Series ZPR/Without Buffer Connection One-Touch Tube Fitting Pad Type Bellows --Vacuum Entry

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1 !2 w e !3 !4 r t y u i !5 !6 No.

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

0: L+ ON, 1: L+ OFF 4..7 Reserved 0 -105No.EX-OMX1011 Configuration format (EX600-LAB1 / EX600-LBB1) Byte 6 to 45 EX600-LAB1 / EX600-LBB1 (46 byte) Byte Bit Parameter Setting value PortConfig Port 1 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3: DI_C/Q 4: DQ_C/Q 6 0..7 PortMode 0: No Device Check 1: Type compatible Device V1.0 2: Type compatible Device V1.1 3: Type compatible Device V1.1

Modular F.R.L. Unit

C 26.5 28 31 36 36 43 46 U 14 16 19 21 21 D 57 55 59 68 68 87 87 V 6 6 7 7 7 E 65 64 66 74 74 84 84 L 44 44 46 54 56 65.8 65.8 F 29.5 28.5 30.5 35 35 44.5 44.5 M 5.4 5.4 6.5 8.5 8.5 11 11 G 2 Note) N 15.4 15.4 8 10.5 10.5 13 13 P 55 55 53 70 70 90 90 Q 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 25 26 31 35.5 37 T 28.5 32.5 38.5 42.5 42.5 AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K 1/8, 1/4 1

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Stopper Cylinder

4 y q r e w @1 @2 !5 !6 t u i o !7 !9 !8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

KJ

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

F

4 M5x0.8 KQS04-M5 2 9.8 23 19.5 16 2.7 2.7 6.3 4 1/8 KQS04-01S 3 9.8 23 19 16 4.1 3.6 7.8 6 M5x0.8 KQS06-M5 2 11.8 24 20.5 17 2.7 2.7 8.5 6 1/8 KQS06-01S 4 11.8 24 20 17 10.0 9.9 8.9 6 1/4 KQS06-02S 4 13.8 25 19 17 10.7 10.0 14.8 8 1/8 KQS08-01S 5 14 28 24 18.5 17.2 16.2 12.4 8 1/4 KQS08-02S 6 14 25.5 19.5 18.5 23.3 16.2 11.3 8 3/8 KQS08-03S 6 17 26.5 20 18.5 23.3 16.2 23.8 10 1/8 KQS10-

V

Orifice Size (Number) 1 2 3 4 5 6 VX21 VX22 VX23 2mm 3mm 4.5mm 6mm 8mm 10mm 01 (1/8) 02 (1/4) 02 (1/4) 02 (1/4) 03 (3/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q Q Q 25 Q Q Series VQZ Base Mounted Type Construction VQZ100 Poppet type N.C.