0.4

q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

CS1

DSM-60S DSM-75S Cast iron DSM-75S(H) Piston r t y u i o !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

NCA1

NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK Bore size (in) 200 (2") 1 5 1/8 1 3 1.18 5 2.56 1 3/8 1 1/8 2.09 2.6 3 5/8 1 1/2 2.40 1 1/8 3.29 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1 1.26 1.06 1.84 3/4-16 250 (2.5") 1 5 1/4 1 3 1/2 1 1.18 5 1/2 3/4-16 3.39 1 1/

NCA1

7/8 2.72 5/8 4 1/4 3/4 2.34 1 1/4 7 1/2 1 1/2 1/2 4.7 1 1/8 3.32 1.25 C76 Side Lug Mounting Style: NCA1S (MS2 mounting style) C85 C95 A ZB + Stroke CP95 Y P + Stroke E NCM LF + Stroke WF C R 4-DD J G 2-EE (NPTF) NCA SB Screw D(4) Hole EA MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

(E) shows the approximate dimension of the inserted tubing from the end of the nut. LVA Connection threads R/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

XLAQ/XLDQ

r, t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

ZPT/ZPX

Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

High Purity Fluoropolymer

SET POS. e Insert bushing G The tubing r may slip if there is oil or dust, etc., on the holder assembly y. Remove the contamination using alcohol or another suitable cleaner. Press the insert bushing e into the tubing r by turning the lever q.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

NCQ8

0 r t !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

42

A 33 75 29 0.4 P R B 64 33 28 0.3 Effective area at exhaust side [mm2] S at P2 = 0.5 MPa A R EA 36 75 78 0.2 B R EB 68 38 69 0.1 Note 1) Set the pressure within the operating pressure range of the valve.

Environment

0 i o e r t q u !1 !2 !3 !

Floating Joint

X530 45 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.2 Foot Type: JAL JAL180 200--X530 F R K M Center of sphere E 4 x J U U D T C 60 G P A H L B Dimensions (mm) Maximum operating tensile and compressive force (N) Center of Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D E F K L T J G H Weight (kg) Nominal size Pitch sphere R 180 JAL180-40-150-X530

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Modular Type Regulator Series AR

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.