15

0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10

Integrated Controller

600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20

Auto Switch Guide

(Tightening torque of M2.5 screw should be 0.1 to 0.2 Nm.) 20 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Data Auto Switch Mounting Bracket Part No.

The MXP is ideal for applications that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees. Two of the mounting surfaces

The MXP is ideal for applications that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees. Two of the mounting surfaces

The MXP is ideal for applications that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees. Two of the mounting surfaces

The MXP is ideal for applications that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees. Two of the mounting surfaces

NCQ8

Weight Unit: OZ, ( ): g Caution Auto switch model 20 (0.5) D-M9N(V) D-M9B(V) D-M9P(V) Operating Precautions 0.28 ( 8) 0.25 ( 7) 0.28 ( 8) Lead wire length in(m) 118 (3 ) 1.45 (41) 1.34 (38) 1.45 (41) Fix the switch with the existing screw installed on the switch body.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Bore Size: 16mm, Stroke: 20mm, Adjuster: C (Metal Stopper), Magnet: N (w/o Magnet and Rail)

Bore Size: 16mm, Stroke: 30mm, Adjuster: Rubber Stopper, Magnet: N (w/o Magnet and Rail)

Bore Size: 16mm, Stroke: 30mm, Adjuster: C (Metal Stopper), Magnet: N (w/o Magnet and Rail)

Bore Size: 16mm, Stroke: 20mm, Adjuster: B (Shock Absorber), Magnet: N (w/o Magnet and Rail)

Bore Size: 16mm, Stroke: 30mm, Adjuster: B (Shock Absorber), Magnet: N (w/o Magnet and Rail)

Type: Table Type, Cylinder Inner Diameter(Ø): 16, Stroke(mm): 20, Max.

Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 56, Table Material: [Aluminum] Aluminum, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 46, Table Size Height H(mm): 32, Table Parallelism(µm): 20, Environment: General Purpose, Maximum Load(kg): 3, Port Screw Type: M screw, Adjuster Option: Rubber stopper, Switch Rail: Yes, Specification: Magnet built-in

Types: Gasket, Maintenance part name: Seal kit, Bore size(ø): 16, Compatible air cylinder details: Compact Cylinder / Platform Cylinder, Long-Stroke Type, Material: -

Bore Size: 16mm, Stroke: 20mm, Adjuster: Metal Stopper, Magnet: w/o Magnet and Rail, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -