CLS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS CLS Bore size (mm) 125 140 160 Tie-rod nut Bore size (mm) Tie-rod nut JIS B 1181 Class 1 M14 x 1.5 JIS B 1181 Class 1 M20 x 1.5 200 CLQ JIS B 1181 Class 1 M16 x 1.5 JIS B 1181 Class 1 M18 x 1.5 180 JIS B 1181 Class 1 M24 x 1.5 250 MLGP Wing nut

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

7

flow ratio to be b = 0.3.

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

C76

A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C

C76

A B A 32 6 7 7 8 40 11 13 12 14 Aim at this number.

CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type S3: Side ported (Lead wire length) 91.7[96.1] Approx. 300 10-SS5YJ3-S31Stations -M3 L1 3.5 L2 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 17.3 30 52.2[54.4] 51.4[53.6] 3 91.7[96.1] 78.8[83.2] 78.8[83.2] A A A A A 13.5 B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4[53.6] 52.2[54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting) Manual override

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

LEC-OM02704CN

(ZP)[1][2][8][0]17bit 14 37 14 (5) ON/OFF((DO)) ON/OFF [9][0] (a) DO [8][B][0][0]0004DO 0 0 0 4 4 DO (b) ON/OFF [9][2] [A][0] b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 (c) DO DO[8][B][0][0] [8][B] [0][0] 0 DO 14 38 14 (6) (a) [8][B][0][0]0003 0 0 0 3 3 (b) ([8][B]

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

MY1

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

17

Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

Thermo-chiller/Rack Mount Type

Maximum load current 500 mA AC/DC (Resistance load) Contact output signal 1, 2, 3 Minimum load current 5 VDC 10 mA 24 VDC Output voltage 24 VDC 10% 500 mA MAX1 (No inductive load) 1 When using the power supply of this product, make sure that the total load current is 500 mA or less. Contact Input/Output Pin Nos. Pin no.