Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details. cable 6 to 12 D D K F G1/2 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts C H C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port
. 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15
Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS
XL -50 XL -63 XL -80 (a) 1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
3.2 6.5 7 7 15 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 3 deep +0.025 0 3H9 3 deep +0.025 0 HA GA Cross section AA Cross section BB (mm) Model F 25 25 40 50 38 50 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up
100 GA GB H H1 I J K KA MM A AL B1 C D E F 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x
(1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V OFF -28- (3)((2)) DC24V M24V EMG () 0V DC24V Ry (1 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (2 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (3 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (1)DC24V M24V EMG , (2)(M24V)(SETUP ON) (M24V) (3
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) D side U side Stations 1 2 3 4 5 6 7 8 n 9 C8: 3(R) port C8: 1(P) port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 P 1 2 2 2 2 2 2 2 29.5 13 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5
H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.
pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3 x 0.5 0.9 Type SS3YJ3-20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M3 x 0.5 M5 x 0.8 1.5 0.17 0.36 0.3 0.17 Type SS3YJ3-42-M5 Base mounted for internal pilot M5 x 0.8 0.31 0.33 0.32
ue DC() Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less FUNC Blue DC() Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V
1 Metal Seal/Rubber Seal Series VQ7-6 Prewired Connector Type 2 position single : VQ7-6-FG-SSC single (Reverse pressure): VQ7-6-YZ-SSC 120.5 120.5 68.5 52 Mounting hole 2-6.5 68.5 50 50 Manual override 42.5 42.5 13 (A port) 13 (B port) 25 25 (R1, R2) 2-3/8 P R2 R1 VK A B 14 11 VZ 38 50 62 50 62 A 12 9 VF R2 R1 P (L 500) Cable with connector B A 2-1/8 13 13 VFR Mounting hole 2-6.5 42.5 42.5
Facility water outlet (For water-cooled type) HRR Series 2.3 Function of Parts 2-5 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.4 Operation display panel The operation panel on the front of the product controls the basic operation of the product 1 3 2-5 RUN 8 MPa 4 ALM 9 WRN 10 LPM 5 11 2 12 RMT 13 6 H 7 SEC 14 16 18 15 MENU RUN/ STOP 17 19 20 ENT RESET Table 2-4 Operation display
Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.
(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54
position single Note) See Options" on p.1.10-67 for inch size One-touch fittings. 1 2 3 4 5 6 100V AC (50/60Hz) G: Grommet C kit single only.
Control unit type (see pages 13 and 14 for details) Control equipment Symbol A AP M MP F G C E Nil Air filter with auto drain Air filter with manual drain Regulator Air release valve Pressure switch Blank plate (air release valve) Blank plate (filter, regulator) Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Manifold Specifications Piping specifications Ports 2